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- W2543244509 abstract "This paper reports a preliminary examination of the effect of anchor geometry design on the quality factor of flexural mode resonators operating in vacuum using both FE simulation and measurements of resonator frequency response. Three types of structures have been considered in this study: an elliptical mode ring, a double ended tuning fork, and a doubly-clamped beam. We consider the relative distribution of strain energies in both the resonant structure and the connecting stem, which is indicative of the measured quality factor. The measured quality factors of the different structures are compared against each other, based on which suggestions are proposed for optimizing the anchor limited quality factor (Q) in flexural mode micromechanical resonators." @default.
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- W2543244509 date "2008-11-01" @default.
- W2543244509 modified "2023-10-16" @default.
- W2543244509 title "Anchor limited Q in flexural mode resonators" @default.
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- W2543244509 doi "https://doi.org/10.1109/ultsym.2008.0548" @default.
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