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- W2545647968 abstract "A novel tester is presented which utilizes MOSFET inversion channels to connect silicided source/drain electrically to satisfy the requirements of a Kelvin tester. This tester, basically two MOSFETs back to back, can be fabricated along with real devices and requires no additional processing steps. Two version of the Kelvin tester have been examined, the cross-bridge Kelvin resistor and the contact end resistor. The principles of these devices are explained, and some measurements are reported.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2545647968 created "2016-11-04" @default.
- W2545647968 creator A5026796679 @default.
- W2545647968 creator A5090351393 @default.
- W2545647968 date "2003-01-06" @default.
- W2545647968 modified "2023-09-26" @default.
- W2545647968 title "A tester for the contact resistivity of self-aligned silicides" @default.
- W2545647968 cites W1983539965 @default.
- W2545647968 cites W1988012911 @default.
- W2545647968 cites W2093556946 @default.
- W2545647968 cites W2133831207 @default.
- W2545647968 cites W2134003317 @default.
- W2545647968 cites W2171845354 @default.
- W2545647968 cites W4230809981 @default.
- W2545647968 doi "https://doi.org/10.1109/iedm.1988.32829" @default.
- W2545647968 hasPublicationYear "2003" @default.
- W2545647968 type Work @default.
- W2545647968 sameAs 2545647968 @default.
- W2545647968 citedByCount "10" @default.
- W2545647968 countsByYear W25456479682014 @default.
- W2545647968 countsByYear W25456479682016 @default.
- W2545647968 crossrefType "proceedings-article" @default.
- W2545647968 hasAuthorship W2545647968A5026796679 @default.
- W2545647968 hasAuthorship W2545647968A5090351393 @default.
- W2545647968 hasConcept C119599485 @default.
- W2545647968 hasConcept C127413603 @default.
- W2545647968 hasConcept C137488568 @default.
- W2545647968 hasConcept C165801399 @default.
- W2545647968 hasConcept C172385210 @default.
- W2545647968 hasConcept C192562407 @default.
- W2545647968 hasConcept C24326235 @default.
- W2545647968 hasConcept C2778413303 @default.
- W2545647968 hasConcept C41008148 @default.
- W2545647968 hasConcept C49040817 @default.
- W2545647968 hasConcept C69990965 @default.
- W2545647968 hasConceptScore W2545647968C119599485 @default.
- W2545647968 hasConceptScore W2545647968C127413603 @default.
- W2545647968 hasConceptScore W2545647968C137488568 @default.
- W2545647968 hasConceptScore W2545647968C165801399 @default.
- W2545647968 hasConceptScore W2545647968C172385210 @default.
- W2545647968 hasConceptScore W2545647968C192562407 @default.
- W2545647968 hasConceptScore W2545647968C24326235 @default.
- W2545647968 hasConceptScore W2545647968C2778413303 @default.
- W2545647968 hasConceptScore W2545647968C41008148 @default.
- W2545647968 hasConceptScore W2545647968C49040817 @default.
- W2545647968 hasConceptScore W2545647968C69990965 @default.
- W2545647968 hasLocation W25456479681 @default.
- W2545647968 hasOpenAccess W2545647968 @default.
- W2545647968 hasPrimaryLocation W25456479681 @default.
- W2545647968 hasRelatedWork W2005060744 @default.
- W2545647968 hasRelatedWork W2014463359 @default.
- W2545647968 hasRelatedWork W2046154201 @default.
- W2545647968 hasRelatedWork W2111851298 @default.
- W2545647968 hasRelatedWork W2141985007 @default.
- W2545647968 hasRelatedWork W2167398694 @default.
- W2545647968 hasRelatedWork W2368042058 @default.
- W2545647968 hasRelatedWork W2545647968 @default.
- W2545647968 hasRelatedWork W2899084033 @default.
- W2545647968 hasRelatedWork W2150757118 @default.
- W2545647968 isParatext "false" @default.
- W2545647968 isRetracted "false" @default.
- W2545647968 magId "2545647968" @default.
- W2545647968 workType "article" @default.