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- W2546299246 abstract "In this paper, a novel pad conditioner, 3MTM TrizactTM Pad Conditioner, B6-M990, consisting of precisely engineered microreplicated abrasive structures coated with a chemical vapor deposited (CVD) diamond film is demonstrated for Front End Of Line (FEOL) Tungsten plug and metal gate applications. Baseline marathon data of W plug and gate processes, comparing the Trizact™ Pad Conditioner to a diamond grit pad conditioner (DG) were generated on a 300 mm AMAT Reflexion® tool. In-situ and ex-situ conditioning processes showed that the pad/conditioner lifetime could be extended by at least a factor of 3 using B6-M990 Trizact™ Pad Conditioner versus the diamond grit conditioner while maintaining the same W and TEOS removal rates." @default.
- W2546299246 created "2016-11-04" @default.
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- W2546299246 date "2014-11-01" @default.
- W2546299246 modified "2023-09-24" @default.
- W2546299246 title "3M microreplicated Trizact<sup>TM</sup> pad conditioners for FEOL tungsten plug and metal gate applications" @default.
- W2546299246 cites W2035791842 @default.
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- W2546299246 doi "https://doi.org/10.1109/icpt.2014.7017307" @default.
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