Matches in SemOpenAlex for { <https://semopenalex.org/work/W2546374630> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2546374630 abstract "This paper presents a process technology to form thin diaphragms with sealed cavities in a lithium niobate (LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> ) wafer, which will be used for small and sensitive SAW-based pressure sensors. The process technology uses thermal inversion, wet etching with an electroplated Au mask, etch stop at the thermal inversion layer and Au-Au bonding. By the combination of an etch stop and pinhole-free masking, LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> thin diaphragms with thicknesses of several tens of mum to 10 mum were fabricated in 128deg Y cut LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> wafers. The Au-Au bonding of the LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> wafer gave hermetic sealing. In addition the etch profiles of the LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> wafer predicted by Wulff-Jaccodine plots and observed in experiments were compared, and good agreement was confirmed." @default.
- W2546374630 created "2016-11-04" @default.
- W2546374630 creator A5024253162 @default.
- W2546374630 creator A5026348879 @default.
- W2546374630 creator A5040613139 @default.
- W2546374630 creator A5055348625 @default.
- W2546374630 date "2008-11-01" @default.
- W2546374630 modified "2023-10-17" @default.
- W2546374630 title "Application of lithium niobate etch stop technology to SAW pressure sensors" @default.
- W2546374630 cites W1966944058 @default.
- W2546374630 cites W1988149833 @default.
- W2546374630 cites W2016721564 @default.
- W2546374630 cites W2019245531 @default.
- W2546374630 cites W2086445299 @default.
- W2546374630 cites W2092504788 @default.
- W2546374630 cites W2102282275 @default.
- W2546374630 cites W2105378326 @default.
- W2546374630 cites W2116143047 @default.
- W2546374630 cites W2130504694 @default.
- W2546374630 cites W2140462254 @default.
- W2546374630 cites W2157137872 @default.
- W2546374630 cites W2158139004 @default.
- W2546374630 cites W2170085477 @default.
- W2546374630 doi "https://doi.org/10.1109/ultsym.2008.0271" @default.
- W2546374630 hasPublicationYear "2008" @default.
- W2546374630 type Work @default.
- W2546374630 sameAs 2546374630 @default.
- W2546374630 citedByCount "5" @default.
- W2546374630 countsByYear W25463746302012 @default.
- W2546374630 countsByYear W25463746302013 @default.
- W2546374630 countsByYear W25463746302016 @default.
- W2546374630 countsByYear W25463746302017 @default.
- W2546374630 crossrefType "proceedings-article" @default.
- W2546374630 hasAuthorship W2546374630A5024253162 @default.
- W2546374630 hasAuthorship W2546374630A5026348879 @default.
- W2546374630 hasAuthorship W2546374630A5040613139 @default.
- W2546374630 hasAuthorship W2546374630A5055348625 @default.
- W2546374630 hasConcept C100460472 @default.
- W2546374630 hasConcept C113196181 @default.
- W2546374630 hasConcept C160671074 @default.
- W2546374630 hasConcept C171250308 @default.
- W2546374630 hasConcept C178790620 @default.
- W2546374630 hasConcept C185592680 @default.
- W2546374630 hasConcept C192562407 @default.
- W2546374630 hasConcept C2777207636 @default.
- W2546374630 hasConcept C2779227376 @default.
- W2546374630 hasConcept C49040817 @default.
- W2546374630 hasConceptScore W2546374630C100460472 @default.
- W2546374630 hasConceptScore W2546374630C113196181 @default.
- W2546374630 hasConceptScore W2546374630C160671074 @default.
- W2546374630 hasConceptScore W2546374630C171250308 @default.
- W2546374630 hasConceptScore W2546374630C178790620 @default.
- W2546374630 hasConceptScore W2546374630C185592680 @default.
- W2546374630 hasConceptScore W2546374630C192562407 @default.
- W2546374630 hasConceptScore W2546374630C2777207636 @default.
- W2546374630 hasConceptScore W2546374630C2779227376 @default.
- W2546374630 hasConceptScore W2546374630C49040817 @default.
- W2546374630 hasLocation W25463746301 @default.
- W2546374630 hasOpenAccess W2546374630 @default.
- W2546374630 hasPrimaryLocation W25463746301 @default.
- W2546374630 hasRelatedWork W161822665 @default.
- W2546374630 hasRelatedWork W2052794911 @default.
- W2546374630 hasRelatedWork W2076620727 @default.
- W2546374630 hasRelatedWork W2103548986 @default.
- W2546374630 hasRelatedWork W2110853318 @default.
- W2546374630 hasRelatedWork W2315307254 @default.
- W2546374630 hasRelatedWork W2357965514 @default.
- W2546374630 hasRelatedWork W2366034008 @default.
- W2546374630 hasRelatedWork W2588244836 @default.
- W2546374630 hasRelatedWork W4362730893 @default.
- W2546374630 isParatext "false" @default.
- W2546374630 isRetracted "false" @default.
- W2546374630 magId "2546374630" @default.
- W2546374630 workType "article" @default.