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- W2546987402 abstract "Diamond-like-carbon (DLC) films are very attractive for SAW devices applications because of their high SAW velocity, which can allow high frequency operation at moderate line-width resolution. Use of AlN as piezoelectric layer on DLC is also attractive because of its high SAW velocity: the highest among all piezoelectric materials, together with its excellent electrical, mechanical and chemical properties. The problem arising in the growth of AlN films on DLC have prevented, up to now, the use of this materials combination. In this paper we report our recent results on the growth of highly oriented, low stressed AlN films on DLC. SAWs propagation on AIN/DLC has been theoretically investigated together with the electromechanical coupling for both the Rayleigh and Sezawa modes. The theoretical calculations show how high SAW velocities are achievable with good coupling efficiencies. Under proper conditions very large piezoelectric couplings are predicted k/sup 2/ = 2.2 and 4 for the Rayleigh and Sezawa wave, respectively, comparable to those observed in strongly piezoelectric single crystal such as LiNbO/sub 3/, but with SAW velocities approximately twice. Experiments performed on AIN/DLC/Si SAW test devices have shown a good agreement between experimental results and theoretical predictions and demonstrate the feasibility of SAW devices based on this technology." @default.
- W2546987402 created "2016-11-11" @default.
- W2546987402 creator A5012835597 @default.
- W2546987402 creator A5043894587 @default.
- W2546987402 creator A5051789187 @default.
- W2546987402 creator A5074715249 @default.
- W2546987402 date "2004-07-09" @default.
- W2546987402 modified "2023-10-18" @default.
- W2546987402 title "Growth of AlN piezoelectric films on diamond for high frequency SAW devices" @default.
- W2546987402 cites W1586379222 @default.
- W2546987402 cites W1741034560 @default.
- W2546987402 cites W2034420330 @default.
- W2546987402 cites W2077288079 @default.
- W2546987402 cites W2106060253 @default.
- W2546987402 cites W2113986844 @default.
- W2546987402 cites W2129191305 @default.
- W2546987402 cites W2140035262 @default.
- W2546987402 cites W2163488222 @default.
- W2546987402 cites W2170022258 @default.
- W2546987402 cites W2204363557 @default.
- W2546987402 cites W2213665410 @default.
- W2546987402 doi "https://doi.org/10.1109/ultsym.2003.1293247" @default.
- W2546987402 hasPublicationYear "2004" @default.
- W2546987402 type Work @default.
- W2546987402 sameAs 2546987402 @default.
- W2546987402 citedByCount "4" @default.
- W2546987402 countsByYear W25469874022013 @default.
- W2546987402 crossrefType "proceedings-article" @default.
- W2546987402 hasAuthorship W2546987402A5012835597 @default.
- W2546987402 hasAuthorship W2546987402A5043894587 @default.
- W2546987402 hasAuthorship W2546987402A5051789187 @default.
- W2546987402 hasAuthorship W2546987402A5074715249 @default.
- W2546987402 hasConcept C100082104 @default.
- W2546987402 hasConcept C120665830 @default.
- W2546987402 hasConcept C121332964 @default.
- W2546987402 hasConcept C123380192 @default.
- W2546987402 hasConcept C131584629 @default.
- W2546987402 hasConcept C153015087 @default.
- W2546987402 hasConcept C159985019 @default.
- W2546987402 hasConcept C162954803 @default.
- W2546987402 hasConcept C171250308 @default.
- W2546987402 hasConcept C19067145 @default.
- W2546987402 hasConcept C192562407 @default.
- W2546987402 hasConcept C24890656 @default.
- W2546987402 hasConcept C2776921476 @default.
- W2546987402 hasConcept C2779227376 @default.
- W2546987402 hasConcept C44886760 @default.
- W2546987402 hasConcept C46244369 @default.
- W2546987402 hasConcept C49040817 @default.
- W2546987402 hasConcept C51473458 @default.
- W2546987402 hasConcept C86194701 @default.
- W2546987402 hasConceptScore W2546987402C100082104 @default.
- W2546987402 hasConceptScore W2546987402C120665830 @default.
- W2546987402 hasConceptScore W2546987402C121332964 @default.
- W2546987402 hasConceptScore W2546987402C123380192 @default.
- W2546987402 hasConceptScore W2546987402C131584629 @default.
- W2546987402 hasConceptScore W2546987402C153015087 @default.
- W2546987402 hasConceptScore W2546987402C159985019 @default.
- W2546987402 hasConceptScore W2546987402C162954803 @default.
- W2546987402 hasConceptScore W2546987402C171250308 @default.
- W2546987402 hasConceptScore W2546987402C19067145 @default.
- W2546987402 hasConceptScore W2546987402C192562407 @default.
- W2546987402 hasConceptScore W2546987402C24890656 @default.
- W2546987402 hasConceptScore W2546987402C2776921476 @default.
- W2546987402 hasConceptScore W2546987402C2779227376 @default.
- W2546987402 hasConceptScore W2546987402C44886760 @default.
- W2546987402 hasConceptScore W2546987402C46244369 @default.
- W2546987402 hasConceptScore W2546987402C49040817 @default.
- W2546987402 hasConceptScore W2546987402C51473458 @default.
- W2546987402 hasConceptScore W2546987402C86194701 @default.
- W2546987402 hasLocation W25469874021 @default.
- W2546987402 hasOpenAccess W2546987402 @default.
- W2546987402 hasPrimaryLocation W25469874021 @default.
- W2546987402 hasRelatedWork W1596600755 @default.
- W2546987402 hasRelatedWork W2000961964 @default.
- W2546987402 hasRelatedWork W2015167643 @default.
- W2546987402 hasRelatedWork W2040605371 @default.
- W2546987402 hasRelatedWork W2042558331 @default.
- W2546987402 hasRelatedWork W2054933495 @default.
- W2546987402 hasRelatedWork W2068666011 @default.
- W2546987402 hasRelatedWork W2072913167 @default.
- W2546987402 hasRelatedWork W2142165286 @default.
- W2546987402 hasRelatedWork W2151068429 @default.
- W2546987402 hasRelatedWork W2155489479 @default.
- W2546987402 hasRelatedWork W2156216836 @default.
- W2546987402 hasRelatedWork W2168716961 @default.
- W2546987402 hasRelatedWork W2316482863 @default.
- W2546987402 hasRelatedWork W2320077519 @default.
- W2546987402 hasRelatedWork W247652747 @default.
- W2546987402 hasRelatedWork W2532480591 @default.
- W2546987402 hasRelatedWork W2782369664 @default.
- W2546987402 hasRelatedWork W3179421640 @default.
- W2546987402 hasRelatedWork W190358974 @default.
- W2546987402 isParatext "false" @default.
- W2546987402 isRetracted "false" @default.
- W2546987402 magId "2546987402" @default.
- W2546987402 workType "article" @default.