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- W2547092806 abstract "Reliability extrapolation of ultrathin (EOT </spl sim/1.5nm) SiON films is greatly hindered by the inability to detect the actual first breakdown. Using larger increases in gate current as the breakdown criterion leads to erroneous lifetime predictions. A semi-empirical model for progressive breakdown wear-out is constructed and corrected methodology for reliability extrapolation for ultrathin oxides is proposed." @default.
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- W2547092806 date "2005-04-19" @default.
- W2547092806 modified "2023-10-10" @default.
- W2547092806 title "Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT ~ 1 mn) SiON films" @default.
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- W2547092806 doi "https://doi.org/10.1109/iedm.2004.1419270" @default.
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