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- W2547470909 abstract "CMOS FinFETs with molybdenum gate and HfO/sub 2/ gate-dielectric are reported. By tuning the gate work function via nitrogen implantation and employing a narrow fin width, low values of threshold voltage (0.28/-0.17 V) and sub-threshold swing (67.5/62.5 mV/dec) were achieved. The use of HfO/sub 2/ rather than SiO/sub 2/ as the gate dielectric reduces the gate leakage current density by several orders of magnitude, for EOT in the range 1.75-1.95 nm. The observed weak temperature dependence for both electron and hole mobilities (/spl mu//sub eff/ /spl sim/ T/sup -0.95/) is ascribed to soft phonon scattering." @default.
- W2547470909 created "2016-11-11" @default.
- W2547470909 creator A5015290434 @default.
- W2547470909 creator A5045267066 @default.
- W2547470909 creator A5055239126 @default.
- W2547470909 creator A5057901524 @default.
- W2547470909 creator A5074275870 @default.
- W2547470909 creator A5078809262 @default.
- W2547470909 creator A5086875357 @default.
- W2547470909 creator A5090017113 @default.
- W2547470909 date "2005-04-19" @default.
- W2547470909 modified "2023-10-18" @default.
- W2547470909 title "Molybdenum-gate HfO/sub 2/ CMOS FinFET technology" @default.
- W2547470909 cites W2019017977 @default.
- W2547470909 cites W2080254265 @default.
- W2547470909 cites W2105990677 @default.
- W2547470909 cites W2120201770 @default.
- W2547470909 cites W2139424966 @default.
- W2547470909 cites W2141137685 @default.
- W2547470909 cites W2150952982 @default.
- W2547470909 doi "https://doi.org/10.1109/iedm.2004.1419248" @default.
- W2547470909 hasPublicationYear "2005" @default.
- W2547470909 type Work @default.
- W2547470909 sameAs 2547470909 @default.
- W2547470909 citedByCount "3" @default.
- W2547470909 countsByYear W25474709092014 @default.
- W2547470909 countsByYear W25474709092019 @default.
- W2547470909 crossrefType "proceedings-article" @default.
- W2547470909 hasAuthorship W2547470909A5015290434 @default.
- W2547470909 hasAuthorship W2547470909A5045267066 @default.
- W2547470909 hasAuthorship W2547470909A5055239126 @default.
- W2547470909 hasAuthorship W2547470909A5057901524 @default.
- W2547470909 hasAuthorship W2547470909A5074275870 @default.
- W2547470909 hasAuthorship W2547470909A5078809262 @default.
- W2547470909 hasAuthorship W2547470909A5086875357 @default.
- W2547470909 hasAuthorship W2547470909A5090017113 @default.
- W2547470909 hasConcept C119599485 @default.
- W2547470909 hasConcept C127413603 @default.
- W2547470909 hasConcept C131017901 @default.
- W2547470909 hasConcept C191897082 @default.
- W2547470909 hasConcept C192562407 @default.
- W2547470909 hasConcept C24326235 @default.
- W2547470909 hasConcept C46362747 @default.
- W2547470909 hasConcept C49040817 @default.
- W2547470909 hasConcept C549387045 @default.
- W2547470909 hasConceptScore W2547470909C119599485 @default.
- W2547470909 hasConceptScore W2547470909C127413603 @default.
- W2547470909 hasConceptScore W2547470909C131017901 @default.
- W2547470909 hasConceptScore W2547470909C191897082 @default.
- W2547470909 hasConceptScore W2547470909C192562407 @default.
- W2547470909 hasConceptScore W2547470909C24326235 @default.
- W2547470909 hasConceptScore W2547470909C46362747 @default.
- W2547470909 hasConceptScore W2547470909C49040817 @default.
- W2547470909 hasConceptScore W2547470909C549387045 @default.
- W2547470909 hasLocation W25474709091 @default.
- W2547470909 hasOpenAccess W2547470909 @default.
- W2547470909 hasPrimaryLocation W25474709091 @default.
- W2547470909 hasRelatedWork W1485027372 @default.
- W2547470909 hasRelatedWork W1936891079 @default.
- W2547470909 hasRelatedWork W2071524226 @default.
- W2547470909 hasRelatedWork W2134806353 @default.
- W2547470909 hasRelatedWork W2136406454 @default.
- W2547470909 hasRelatedWork W2139145693 @default.
- W2547470909 hasRelatedWork W2145015417 @default.
- W2547470909 hasRelatedWork W2165818487 @default.
- W2547470909 hasRelatedWork W2241814608 @default.
- W2547470909 hasRelatedWork W4245074354 @default.
- W2547470909 isParatext "false" @default.
- W2547470909 isRetracted "false" @default.
- W2547470909 magId "2547470909" @default.
- W2547470909 workType "article" @default.