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• W2547492053 abstract "Abstract This study investigates how different metal gate fabrication methods induce variations in the defects which result from nitrogen diffusing into the hafnium oxide layer in metal–oxide–semiconductor field effect transistors (MOSFETs). By using the different fabrication methods of pre-TaN, post-TaN and post-TiN annealing, the work-function difference between the gate material and the semiconductor can be adjusted, leading to apparent differences in threshold voltage (V th ). In addition, the results of slow and fast I–V NBTI measurements show that the amount of the bulk trapping in the post-TiN device is the highest, followed by the post-TaN device and then the pre-TaN device. In addition, a nitrogen interstitial defect phenomenon, resulting in a temporary shift of threshold voltage (V th ) which is highest in the post-TiN the lowest in the pre-TaN device, is determined by double sweep fast I–V measurements." @default.
• W2547492053 created "2016-11-11" @default.
• W2547492053 creator A5003303543 @default.
• W2547492053 creator A5005193508 @default.
• W2547492053 creator A5006639056 @default.
• W2547492053 creator A5010539650 @default.
• W2547492053 creator A5029209639 @default.
• W2547492053 creator A5030297257 @default.
• W2547492053 creator A5041096095 @default.
• W2547492053 creator A5048826597 @default.
• W2547492053 creator A5061682318 @default.
• W2547492053 creator A5062780103 @default.
• W2547492053 creator A5070924732 @default.
• W2547492053 creator A5081838658 @default.
• W2547492053 date "2016-12-01" @default.
• W2547492053 modified "2023-10-18" @default.
• W2547492053 title "Effects of fabrication method on defects induced by nitrogen diffusion to the hafnium oxide layer in metal–oxide–semiconductor field effect transistors" @default.
• W2547492053 cites W1634198957 @default.
• W2547492053 cites W1970477494 @default.
• W2547492053 cites W1973785269 @default.
• W2547492053 cites W1980808409 @default.
• W2547492053 cites W1985209067 @default.
• W2547492053 cites W2017382270 @default.
• W2547492053 cites W2035260470 @default.
• W2547492053 cites W2036455453 @default.
• W2547492053 cites W2039063177 @default.
• W2547492053 cites W2047571854 @default.
• W2547492053 cites W2066304213 @default.
• W2547492053 cites W2067161328 @default.
• W2547492053 cites W2068807746 @default.
• W2547492053 cites W2090874352 @default.
• W2547492053 cites W2123489707 @default.
• W2547492053 cites W2142133539 @default.
• W2547492053 cites W2167021379 @default.
• W2547492053 cites W2564122730 @default.
• W2547492053 cites W3099312374 @default.
• W2547492053 doi "https://doi.org/10.1016/j.tsf.2016.09.062" @default.
• W2547492053 hasPublicationYear "2016" @default.
• W2547492053 type Work @default.
• W2547492053 sameAs 2547492053 @default.
• W2547492053 citedByCount "1" @default.
• W2547492053 countsByYear W25474920532020 @default.
• W2547492053 crossrefType "journal-article" @default.
• W2547492053 hasAuthorship W2547492053A5003303543 @default.
• W2547492053 hasAuthorship W2547492053A5005193508 @default.
• W2547492053 hasAuthorship W2547492053A5006639056 @default.
• W2547492053 hasAuthorship W2547492053A5010539650 @default.
• W2547492053 hasAuthorship W2547492053A5029209639 @default.
• W2547492053 hasAuthorship W2547492053A5030297257 @default.
• W2547492053 hasAuthorship W2547492053A5041096095 @default.
• W2547492053 hasAuthorship W2547492053A5048826597 @default.
• W2547492053 hasAuthorship W2547492053A5061682318 @default.
• W2547492053 hasAuthorship W2547492053A5062780103 @default.
• W2547492053 hasAuthorship W2547492053A5070924732 @default.
• W2547492053 hasAuthorship W2547492053A5081838658 @default.
• W2547492053 hasConcept C108225325 @default.
• W2547492053 hasConcept C113196181 @default.
• W2547492053 hasConcept C115235246 @default.
• W2547492053 hasConcept C119599485 @default.
• W2547492053 hasConcept C127413603 @default.
• W2547492053 hasConcept C136525101 @default.
• W2547492053 hasConcept C142724271 @default.
• W2547492053 hasConcept C145598152 @default.
• W2547492053 hasConcept C165801399 @default.
• W2547492053 hasConcept C171250308 @default.
• W2547492053 hasConcept C172385210 @default.
• W2547492053 hasConcept C178790620 @default.
• W2547492053 hasConcept C185592680 @default.
• W2547492053 hasConcept C191897082 @default.
• W2547492053 hasConcept C192562407 @default.
• W2547492053 hasConcept C195370968 @default.
• W2547492053 hasConcept C204787440 @default.
• W2547492053 hasConcept C2361726 @default.
• W2547492053 hasConcept C2777855556 @default.
• W2547492053 hasConcept C2779227376 @default.
• W2547492053 hasConcept C2779851234 @default.
• W2547492053 hasConcept C43617362 @default.
• W2547492053 hasConcept C49040817 @default.
• W2547492053 hasConcept C51140833 @default.
• W2547492053 hasConcept C525849907 @default.
• W2547492053 hasConcept C534791751 @default.
• W2547492053 hasConcept C537208039 @default.
• W2547492053 hasConcept C546638069 @default.
• W2547492053 hasConcept C71924100 @default.
• W2547492053 hasConceptScore W2547492053C108225325 @default.
• W2547492053 hasConceptScore W2547492053C113196181 @default.
• W2547492053 hasConceptScore W2547492053C115235246 @default.
• W2547492053 hasConceptScore W2547492053C119599485 @default.
• W2547492053 hasConceptScore W2547492053C127413603 @default.
• W2547492053 hasConceptScore W2547492053C136525101 @default.
• W2547492053 hasConceptScore W2547492053C142724271 @default.
• W2547492053 hasConceptScore W2547492053C145598152 @default.
• W2547492053 hasConceptScore W2547492053C165801399 @default.
• W2547492053 hasConceptScore W2547492053C171250308 @default.
• W2547492053 hasConceptScore W2547492053C172385210 @default.
• W2547492053 hasConceptScore W2547492053C178790620 @default.
• W2547492053 hasConceptScore W2547492053C185592680 @default.
• W2547492053 hasConceptScore W2547492053C191897082 @default.
• W2547492053 hasConceptScore W2547492053C192562407 @default.
• W2547492053 hasConceptScore W2547492053C195370968 @default.

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