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- W2547515112 abstract "The REMO (REflective MOdulator) component is a micromechanical light modulator fabricated by polysilicon surface micromachining. Its operation principle is based on a Fabry-Perot consisting of two polysilicon mirrors. In the present paper a systematic study of the effects of high operation stresses in combination with humid air is presented. Slow crack growth is evaluated by visual inspection of precracked structures. Electrical and mechanical drift phenomena are characterized by recording the resonance frequency in vacuum after continuous operation during several weeks." @default.
- W2547515112 created "2016-11-11" @default.
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- W2547515112 date "2005-08-24" @default.
- W2547515112 modified "2023-09-26" @default.
- W2547515112 title "Breakdown mechanisms of electrostatic polysilicon actuators using as an example the REMO-component" @default.
- W2547515112 cites W1912423228 @default.
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- W2547515112 doi "https://doi.org/10.1109/leosst.1996.540774" @default.
- W2547515112 hasPublicationYear "2005" @default.
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