FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2548283008> ?p ?o ?g. }

• W2548283008 abstract "Multiple gate field-effect transistors (MuGFET) are generally used in modern time semiconductor field due to better transistor current flow. However in the last advanced generation, MuGFET has transferred to Fin Field Effect Transistor (FinFET) structure with 3 dimensional (3-D) geometry to enable the minimize off-state leakage currents, high transistor current flow and quick switch…etc. advantages. But 3D structure will limit the depth of focus (DOF) of lithography. Chemical Mechanical polishing (CMP) planarization process has become more and more important to improve this issue in FinFET production. At L14 node CMP processes, a new Amorphous Si (A-Si) CMP process is introduced to reduce the roughness after the Amorphous Silicon deposition of gate. In this study, a robust ASICMP process with better A-Si polishing profile (range control), lower defectivity and better thickness control has been evaluated to meet the ASICMP process criteria at 14nm node. Optimizing the process control algorithm and down force condition for each polishing zone could improve process stable and range control. Fine tune full-vision spectrum can obvious enhance thickness control accurately." @default.
• W2548283008 created "2016-11-11" @default.
• W2548283008 creator A5000207102 @default.
• W2548283008 creator A5014318397 @default.
• W2548283008 creator A5014361266 @default.
• W2548283008 creator A5015658322 @default.
• W2548283008 creator A5017792951 @default.
• W2548283008 creator A5021349684 @default.
• W2548283008 creator A5040271495 @default.
• W2548283008 creator A5041568841 @default.
• W2548283008 creator A5051682236 @default.
• W2548283008 creator A5052890601 @default.
• W2548283008 creator A5055254615 @default.
• W2548283008 creator A5056175061 @default.
• W2548283008 creator A5067490680 @default.
• W2548283008 creator A5073310578 @default.
• W2548283008 date "2014-11-01" @default.
• W2548283008 modified "2023-09-27" @default.
• W2548283008 title "The Amorphous-Si CMP process improvement for L14 nm FinFET technology node" @default.
• W2548283008 cites W2001894083 @default.
• W2548283008 cites W2028789136 @default.
• W2548283008 cites W2069267024 @default.
• W2548283008 cites W2071442656 @default.
• W2548283008 cites W2109587329 @default.
• W2548283008 cites W2117942981 @default.
• W2548283008 cites W2123949733 @default.
• W2548283008 cites W2131488301 @default.
• W2548283008 cites W2135650105 @default.
• W2548283008 cites W2162517322 @default.
• W2548283008 cites W2171839342 @default.
• W2548283008 cites W2542396569 @default.
• W2548283008 cites W2544564161 @default.
• W2548283008 doi "https://doi.org/10.1109/icpt.2014.7017276" @default.
• W2548283008 hasPublicationYear "2014" @default.
• W2548283008 type Work @default.
• W2548283008 sameAs 2548283008 @default.
• W2548283008 citedByCount "0" @default.
• W2548283008 crossrefType "proceedings-article" @default.
• W2548283008 hasAuthorship W2548283008A5000207102 @default.
• W2548283008 hasAuthorship W2548283008A5014318397 @default.
• W2548283008 hasAuthorship W2548283008A5014361266 @default.
• W2548283008 hasAuthorship W2548283008A5015658322 @default.
• W2548283008 hasAuthorship W2548283008A5017792951 @default.
• W2548283008 hasAuthorship W2548283008A5021349684 @default.
• W2548283008 hasAuthorship W2548283008A5040271495 @default.
• W2548283008 hasAuthorship W2548283008A5041568841 @default.
• W2548283008 hasAuthorship W2548283008A5051682236 @default.
• W2548283008 hasAuthorship W2548283008A5052890601 @default.
• W2548283008 hasAuthorship W2548283008A5055254615 @default.
• W2548283008 hasAuthorship W2548283008A5056175061 @default.
• W2548283008 hasAuthorship W2548283008A5067490680 @default.
• W2548283008 hasAuthorship W2548283008A5073310578 @default.
• W2548283008 hasConcept C107365816 @default.
• W2548283008 hasConcept C111919701 @default.
• W2548283008 hasConcept C119599485 @default.
• W2548283008 hasConcept C127413603 @default.
• W2548283008 hasConcept C138113353 @default.
• W2548283008 hasConcept C155386361 @default.
• W2548283008 hasConcept C159985019 @default.
• W2548283008 hasConcept C160671074 @default.
• W2548283008 hasConcept C165801399 @default.
• W2548283008 hasConcept C171250308 @default.
• W2548283008 hasConcept C172385210 @default.
• W2548283008 hasConcept C178790620 @default.
• W2548283008 hasConcept C180088628 @default.
• W2548283008 hasConcept C185592680 @default.
• W2548283008 hasConcept C191897082 @default.
• W2548283008 hasConcept C192562407 @default.
• W2548283008 hasConcept C204223013 @default.
• W2548283008 hasConcept C24326235 @default.
• W2548283008 hasConcept C41008148 @default.
• W2548283008 hasConcept C49040817 @default.
• W2548283008 hasConcept C56052488 @default.
• W2548283008 hasConcept C61696701 @default.
• W2548283008 hasConcept C62611344 @default.
• W2548283008 hasConcept C66018809 @default.
• W2548283008 hasConcept C66938386 @default.
• W2548283008 hasConcept C98045186 @default.
• W2548283008 hasConceptScore W2548283008C107365816 @default.
• W2548283008 hasConceptScore W2548283008C111919701 @default.
• W2548283008 hasConceptScore W2548283008C119599485 @default.
• W2548283008 hasConceptScore W2548283008C127413603 @default.
• W2548283008 hasConceptScore W2548283008C138113353 @default.
• W2548283008 hasConceptScore W2548283008C155386361 @default.
• W2548283008 hasConceptScore W2548283008C159985019 @default.
• W2548283008 hasConceptScore W2548283008C160671074 @default.
• W2548283008 hasConceptScore W2548283008C165801399 @default.
• W2548283008 hasConceptScore W2548283008C171250308 @default.
• W2548283008 hasConceptScore W2548283008C172385210 @default.
• W2548283008 hasConceptScore W2548283008C178790620 @default.
• W2548283008 hasConceptScore W2548283008C180088628 @default.
• W2548283008 hasConceptScore W2548283008C185592680 @default.
• W2548283008 hasConceptScore W2548283008C191897082 @default.
• W2548283008 hasConceptScore W2548283008C192562407 @default.
• W2548283008 hasConceptScore W2548283008C204223013 @default.
• W2548283008 hasConceptScore W2548283008C24326235 @default.
• W2548283008 hasConceptScore W2548283008C41008148 @default.
• W2548283008 hasConceptScore W2548283008C49040817 @default.
• W2548283008 hasConceptScore W2548283008C56052488 @default.
• W2548283008 hasConceptScore W2548283008C61696701 @default.

• next