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- W2548311779 abstract "We demonstrated the diaphragm type PZT oscillator performance through simulation experiments. To achieve the desired frequency, firstly, the size of a diaphragm and a thickness of PZT and Si layers are optimized. Then, we select three different PZT/Si models. Finally, we analyze the models transmission efficiency, receiving sensitivity (piezoelectric voltage / electric charge) and frequency bandwidth using an FEM simulator. The remarkable finding is that the receiving frequency bandwidth of the proposed model is much wider than a typical one. In addition, we confirmed a superiority and a future task in consideration of producing a piezoelectric micromachined ultrasonic transducer (pMUT) array." @default.
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- W2548311779 date "2016-09-01" @default.
- W2548311779 modified "2023-09-26" @default.
- W2548311779 title "Piezoelectric characteristic analysis of diaphragm type PZT oscillator" @default.
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- W2548311779 doi "https://doi.org/10.1109/ultsym.2016.7728534" @default.
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