Matches in SemOpenAlex for { <https://semopenalex.org/work/W2548347811> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2548347811 abstract "In this paper, the diffusion of gas atoms that injected by ion implantation into a layer of certain thickness is studied and investigated by using the equation for the local gas atom concentration. The ion implantation in to multilayer membrane will be investigated and parameterized, with various situations will be discussed. Notablly, we assume that the implanted ion flux up on the surface dose not sputter the target atomes or in other words the coefficient of sputtering is small which means that the incident ions are light." @default.
- W2548347811 created "2016-11-11" @default.
- W2548347811 creator A5051066072 @default.
- W2548347811 creator A5067363626 @default.
- W2548347811 creator A5081611151 @default.
- W2548347811 date "2006-01-01" @default.
- W2548347811 modified "2023-09-23" @default.
- W2548347811 title "Model Calculation for Ion Implantation" @default.
- W2548347811 cites W1985463741 @default.
- W2548347811 cites W2027060041 @default.
- W2548347811 hasPublicationYear "2006" @default.
- W2548347811 type Work @default.
- W2548347811 sameAs 2548347811 @default.
- W2548347811 citedByCount "0" @default.
- W2548347811 crossrefType "journal-article" @default.
- W2548347811 hasAuthorship W2548347811A5051066072 @default.
- W2548347811 hasAuthorship W2548347811A5067363626 @default.
- W2548347811 hasAuthorship W2548347811A5081611151 @default.
- W2548347811 hasConcept C113196181 @default.
- W2548347811 hasConcept C121332964 @default.
- W2548347811 hasConcept C145148216 @default.
- W2548347811 hasConcept C149635348 @default.
- W2548347811 hasConcept C171250308 @default.
- W2548347811 hasConcept C178790620 @default.
- W2548347811 hasConcept C184779094 @default.
- W2548347811 hasConcept C185592680 @default.
- W2548347811 hasConcept C19067145 @default.
- W2548347811 hasConcept C191897082 @default.
- W2548347811 hasConcept C192562407 @default.
- W2548347811 hasConcept C22423302 @default.
- W2548347811 hasConcept C2779227376 @default.
- W2548347811 hasConcept C41008148 @default.
- W2548347811 hasConcept C41823505 @default.
- W2548347811 hasConcept C43617362 @default.
- W2548347811 hasConcept C58312451 @default.
- W2548347811 hasConcept C68709404 @default.
- W2548347811 hasConcept C69357855 @default.
- W2548347811 hasConcept C97355855 @default.
- W2548347811 hasConceptScore W2548347811C113196181 @default.
- W2548347811 hasConceptScore W2548347811C121332964 @default.
- W2548347811 hasConceptScore W2548347811C145148216 @default.
- W2548347811 hasConceptScore W2548347811C149635348 @default.
- W2548347811 hasConceptScore W2548347811C171250308 @default.
- W2548347811 hasConceptScore W2548347811C178790620 @default.
- W2548347811 hasConceptScore W2548347811C184779094 @default.
- W2548347811 hasConceptScore W2548347811C185592680 @default.
- W2548347811 hasConceptScore W2548347811C19067145 @default.
- W2548347811 hasConceptScore W2548347811C191897082 @default.
- W2548347811 hasConceptScore W2548347811C192562407 @default.
- W2548347811 hasConceptScore W2548347811C22423302 @default.
- W2548347811 hasConceptScore W2548347811C2779227376 @default.
- W2548347811 hasConceptScore W2548347811C41008148 @default.
- W2548347811 hasConceptScore W2548347811C41823505 @default.
- W2548347811 hasConceptScore W2548347811C43617362 @default.
- W2548347811 hasConceptScore W2548347811C58312451 @default.
- W2548347811 hasConceptScore W2548347811C68709404 @default.
- W2548347811 hasConceptScore W2548347811C69357855 @default.
- W2548347811 hasConceptScore W2548347811C97355855 @default.
- W2548347811 hasLocation W25483478111 @default.
- W2548347811 hasOpenAccess W2548347811 @default.
- W2548347811 hasPrimaryLocation W25483478111 @default.
- W2548347811 hasRelatedWork W1983651930 @default.
- W2548347811 hasRelatedWork W2015891300 @default.
- W2548347811 hasRelatedWork W2018582444 @default.
- W2548347811 hasRelatedWork W2027478590 @default.
- W2548347811 hasRelatedWork W2045460879 @default.
- W2548347811 hasRelatedWork W2046527890 @default.
- W2548347811 hasRelatedWork W2046986693 @default.
- W2548347811 hasRelatedWork W2049969746 @default.
- W2548347811 hasRelatedWork W2056907920 @default.
- W2548347811 hasRelatedWork W2060217810 @default.
- W2548347811 hasRelatedWork W2067008258 @default.
- W2548347811 hasRelatedWork W2075155570 @default.
- W2548347811 hasRelatedWork W2084339711 @default.
- W2548347811 hasRelatedWork W2089639388 @default.
- W2548347811 hasRelatedWork W2094367083 @default.
- W2548347811 hasRelatedWork W2513320684 @default.
- W2548347811 hasRelatedWork W2806373182 @default.
- W2548347811 hasRelatedWork W35510713 @default.
- W2548347811 hasRelatedWork W407924111 @default.
- W2548347811 hasRelatedWork W55762890 @default.
- W2548347811 hasVolume "24" @default.
- W2548347811 isParatext "false" @default.
- W2548347811 isRetracted "false" @default.
- W2548347811 magId "2548347811" @default.
- W2548347811 workType "article" @default.