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- W2548483339 abstract "The diffusion during rapid thermal annealing (RTA) of ion implanted boron and BF/sub 2/ was modeled by considering the reaction kinetics between point defects and boron. The diffusion model utilizes Monte Carlo generated point defect profiles, an extended defect model and a surface amorphization model for high dose implantation. Excellent simulation results have been achieved by using a single set of diffusion and kinetic parameters to model the enhanced diffusion of boron during RTA for a wide range of B and BF/sub 2/ implant doses. >" @default.
- W2548483339 created "2016-11-11" @default.
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- W2548483339 date "1992-01-01" @default.
- W2548483339 modified "2023-09-26" @default.
- W2548483339 title "Physical model for the diffusion of ion implanted boron and BF/sub 2/ during rapid thermal annealing" @default.
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- W2548483339 doi "https://doi.org/10.1109/iedm.1992.307333" @default.
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