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• W2550109953 abstract "Using the method of optical emission spectroscopy, the dynamics of the development and extinction of a pulsating SHF discharge, its time instability, and the ranges of stable pressure-related operation of a resona- tor-type SHF plasmatron on the basis of an annular waveguide-slit applicator were investigated. It is found that at the pressures of CF4 and its mixtures with oxygen optimal for breakdown a virtually complete lack of reproducibility of the signals of the components of the emission spectrum (in particular, of the FI 703.7-nm line) from pulse to pulse of the discharge has been established. A discharge in oxygen in the investigated range of pressures and powers is characterized by a good repetition of the form of the pulses of the emission spectrum line (considered in relation to the OI 844.6-nm line). Introduction. At the present time, SHF generators with a simplified circuit of feeding rectified filtered voltage of industrial frequency are widely used as SHF power sources as parts of experimental research and industrial equip- ment of SHF vacuum plasma treatment of materials. This scheme of feeding magnetrons (M-105, M-112, M-81, etc.) presupposes a quasicontinuous mode of their operation, which is expressed in a pulsating character of generated SHF power delivered by a generator to supply the load. This, in turn, leads to a pulsating mode of the occurrence of SHF discharge excited in the discharge zone of the SHF plasmatron. As is known (1, 2), a plasma load is of a reactive character, while the pulsating periodically repeated change in the phase and magnitude of the reactive resistance of the load is responsible for the periodically repeated changes in the operation mode of the magnetron as a vacuum gener- ator. This influences the stability of the generation of the SHF power delivered to supply the load. As a result, even if in the waveguide circuit between the magnetron and the load there is a circulator and also devices for matching the electrical resistance of the waveguide circuit with the plasmatron under nonstationary conditions of magnetron supply, it is impossible to provide complete decoupling of the generator and the load. One cannot also exclude the instability of a discharge due to both the operation of the magnetron and plasma instabilities because of the electron-ion drift, spatial anisotropy, and other phenomena. Therefore, investigation of the stability of a SHF discharge under various conditions of plasma formation is not only of scientific, but also of practical interest owing to the necessity of ensur- ing the reproducibility and control of the plasma effect on the surface of a material from cycle to cycle of treatment. Experimental. The stability of an SHF discharge was investigated with the aid of a spectral diagnostic com- plex (Fig. 1). The experiments were carried out in an atmosphere of Refrigerant-14 (CF 4), technically pure oxygen (O2), and their mixtures on a setup that includes a resonator SHF plasmatron with a discharge chamber of diameter 150 mm and length 400 mm (3). The plasmatron was fed from an SHF generator assembled on the basis of an M-81 magnetron with a controlled output power in the range 500-5000 W. Photoelectrical recording of a spectrum in the wavelength range 360-900 nm was done with the aid of a ZMR-3 monochromator, with an FEU-79 serving as a photodetector. An IVN-1 stabilized high-voltage source was used as power supply. The signals from the monochromator were fed to the first S8-13 storage oscillograph. The sig-" @default.
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• W2550109953 date "2002-01-01" @default.
• W2550109953 modified "2023-09-24" @default.
• W2550109953 title "STABILITY OF AN SHF DISCHARGE RUNNING IN A RESONATOR-TYPE PLASMATRON ON THE BASIS OF A WAVEGUIDE-SLIT APPLICATOR" @default.
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