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• W2550511871 endingPage "074006" @default.
• W2550511871 startingPage "074006" @default.
• W2550511871 abstract "The standard collinear four-point probe method is an indispensable tool and has been extensively used for characterizing conductive thin films with homogeneous and isotropic electrical properties. In this paper, we conduct three-dimensional (3D) finite element simulations on conductive multilayer films to study the relationship between the reading of the four-point probe and the conductivity of the individual layers. We find that a multilayer film may be modeled as a simple equivalent circuit with multiple resistances, connected in parallel for a wide range of resistivity and thickness ratios, as long as its total thickness is smaller than approximately half of the probe spacing. As a result, we may determine the resistivity of each layer sequentially by applying the four-point probe, with the original correction factor π/ln(2), after deposition of each layer." @default.
• W2550511871 created "2016-11-30" @default.
• W2550511871 creator A5019932793 @default.
• W2550511871 creator A5063504780 @default.
• W2550511871 date "2016-05-31" @default.
• W2550511871 modified "2023-09-29" @default.
• W2550511871 title "Finite element analysis and equivalent parallel-resistance model for conductive multilayer thin films" @default.
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• W2550511871 doi "https://doi.org/10.1088/0957-0233/27/7/074006" @default.
• W2550511871 hasPublicationYear "2016" @default.
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