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• W2550989815 abstract "Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X-ray reflectance measurements, resonant EUV reflectance across the Sc L edge, and X-ray standing wave fluorescence measurements were used. The parameters of the multilayer model were determined via a particle-swarm optimizer and validated using a Markov chain Monte Carlo maximum-likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted." @default.
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• W2550989815 date "2016-11-24" @default.
• W2550989815 modified "2023-10-18" @default.
• W2550989815 title "Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements" @default.
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• W2550989815 doi "https://doi.org/10.1107/s1600576716015776" @default.
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