Matches in SemOpenAlex for { <https://semopenalex.org/work/W2551150957> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2551150957 abstract "With the adoption of TSVs (through-silicon vias) becoming more widespread, as the technologies and process flows necessary for the creation of the vias are established, back-end processes are receiving additional focus." @default.
- W2551150957 created "2016-11-30" @default.
- W2551150957 creator A5019214492 @default.
- W2551150957 creator A5080170005 @default.
- W2551150957 creator A5081454383 @default.
- W2551150957 date "2011-12-01" @default.
- W2551150957 modified "2023-09-25" @default.
- W2551150957 title "Yield and productivity improvements through use of advanced dual plasma source for TSV reveal & wafer dicing applications" @default.
- W2551150957 cites W2096571799 @default.
- W2551150957 cites W2111439638 @default.
- W2551150957 cites W2127258915 @default.
- W2551150957 doi "https://doi.org/10.1109/eptc.2011.6184488" @default.
- W2551150957 hasPublicationYear "2011" @default.
- W2551150957 type Work @default.
- W2551150957 sameAs 2551150957 @default.
- W2551150957 citedByCount "5" @default.
- W2551150957 countsByYear W25511509572012 @default.
- W2551150957 countsByYear W25511509572013 @default.
- W2551150957 countsByYear W25511509572014 @default.
- W2551150957 countsByYear W25511509572018 @default.
- W2551150957 crossrefType "proceedings-article" @default.
- W2551150957 hasAuthorship W2551150957A5019214492 @default.
- W2551150957 hasAuthorship W2551150957A5080170005 @default.
- W2551150957 hasAuthorship W2551150957A5081454383 @default.
- W2551150957 hasConcept C121332964 @default.
- W2551150957 hasConcept C124952713 @default.
- W2551150957 hasConcept C127413603 @default.
- W2551150957 hasConcept C134121241 @default.
- W2551150957 hasConcept C139719470 @default.
- W2551150957 hasConcept C142362112 @default.
- W2551150957 hasConcept C159985019 @default.
- W2551150957 hasConcept C160671074 @default.
- W2551150957 hasConcept C162324750 @default.
- W2551150957 hasConcept C165013422 @default.
- W2551150957 hasConcept C192562407 @default.
- W2551150957 hasConcept C204983608 @default.
- W2551150957 hasConcept C24326235 @default.
- W2551150957 hasConcept C2780980858 @default.
- W2551150957 hasConcept C49040817 @default.
- W2551150957 hasConcept C544956773 @default.
- W2551150957 hasConcept C62520636 @default.
- W2551150957 hasConcept C82706917 @default.
- W2551150957 hasConceptScore W2551150957C121332964 @default.
- W2551150957 hasConceptScore W2551150957C124952713 @default.
- W2551150957 hasConceptScore W2551150957C127413603 @default.
- W2551150957 hasConceptScore W2551150957C134121241 @default.
- W2551150957 hasConceptScore W2551150957C139719470 @default.
- W2551150957 hasConceptScore W2551150957C142362112 @default.
- W2551150957 hasConceptScore W2551150957C159985019 @default.
- W2551150957 hasConceptScore W2551150957C160671074 @default.
- W2551150957 hasConceptScore W2551150957C162324750 @default.
- W2551150957 hasConceptScore W2551150957C165013422 @default.
- W2551150957 hasConceptScore W2551150957C192562407 @default.
- W2551150957 hasConceptScore W2551150957C204983608 @default.
- W2551150957 hasConceptScore W2551150957C24326235 @default.
- W2551150957 hasConceptScore W2551150957C2780980858 @default.
- W2551150957 hasConceptScore W2551150957C49040817 @default.
- W2551150957 hasConceptScore W2551150957C544956773 @default.
- W2551150957 hasConceptScore W2551150957C62520636 @default.
- W2551150957 hasConceptScore W2551150957C82706917 @default.
- W2551150957 hasLocation W25511509571 @default.
- W2551150957 hasOpenAccess W2551150957 @default.
- W2551150957 hasPrimaryLocation W25511509571 @default.
- W2551150957 hasRelatedWork W1990064372 @default.
- W2551150957 hasRelatedWork W2002758544 @default.
- W2551150957 hasRelatedWork W2006613451 @default.
- W2551150957 hasRelatedWork W2021456425 @default.
- W2551150957 hasRelatedWork W2033140589 @default.
- W2551150957 hasRelatedWork W2035692976 @default.
- W2551150957 hasRelatedWork W2037831697 @default.
- W2551150957 hasRelatedWork W2065946205 @default.
- W2551150957 hasRelatedWork W2084897981 @default.
- W2551150957 hasRelatedWork W2092686655 @default.
- W2551150957 hasRelatedWork W2109801454 @default.
- W2551150957 hasRelatedWork W2117182320 @default.
- W2551150957 hasRelatedWork W2146042676 @default.
- W2551150957 hasRelatedWork W2154020379 @default.
- W2551150957 hasRelatedWork W2165745597 @default.
- W2551150957 hasRelatedWork W2166150228 @default.
- W2551150957 hasRelatedWork W2197018030 @default.
- W2551150957 hasRelatedWork W2384356980 @default.
- W2551150957 hasRelatedWork W3154138822 @default.
- W2551150957 hasRelatedWork W2106486561 @default.
- W2551150957 isParatext "false" @default.
- W2551150957 isRetracted "false" @default.
- W2551150957 magId "2551150957" @default.
- W2551150957 workType "article" @default.