Matches in SemOpenAlex for { <https://semopenalex.org/work/W2551623573> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2551623573 endingPage "085104" @default.
- W2551623573 startingPage "085104" @default.
- W2551623573 abstract "A planar nano-positioner driven by the shear piezoelectric actuators is proposed in this paper based on inertial sliding theory. The performance of the nano-positioner actuated by different driving signals is analyzed and discussed, e.g. the resolution and the average velocity which depend on the frequency, the amplitude and the wave form of the driving curves. Based on the proposed design, a prototype system of the nano-positioner is developed by using a capacitive sensor as the measurement device. The experiment results show that the proposed nano-positioner is capable of outputting two-dimensional motions within an area of 10 mm × 10 mm at a maximum speed of 0.25 mm/s. The corresponding resolution can be as small as 21 nm. The methodology outlined in this paper can be employed and extended to shear piezoelectric actuators involved in high precision positioning systems." @default.
- W2551623573 created "2016-11-30" @default.
- W2551623573 creator A5012649127 @default.
- W2551623573 creator A5012757504 @default.
- W2551623573 creator A5018296394 @default.
- W2551623573 date "2016-08-01" @default.
- W2551623573 modified "2023-09-27" @default.
- W2551623573 title "A planar nano-positioner driven by shear piezoelectric actuators" @default.
- W2551623573 cites W1875829743 @default.
- W2551623573 cites W1969164044 @default.
- W2551623573 cites W1991379077 @default.
- W2551623573 cites W2010301285 @default.
- W2551623573 cites W2023885103 @default.
- W2551623573 cites W2043760609 @default.
- W2551623573 cites W2064812684 @default.
- W2551623573 cites W2075677217 @default.
- W2551623573 cites W2085343825 @default.
- W2551623573 cites W2095167904 @default.
- W2551623573 cites W2099011949 @default.
- W2551623573 cites W2101434706 @default.
- W2551623573 cites W2142498250 @default.
- W2551623573 doi "https://doi.org/10.1063/1.4960838" @default.
- W2551623573 hasPublicationYear "2016" @default.
- W2551623573 type Work @default.
- W2551623573 sameAs 2551623573 @default.
- W2551623573 citedByCount "9" @default.
- W2551623573 countsByYear W25516235732018 @default.
- W2551623573 countsByYear W25516235732019 @default.
- W2551623573 countsByYear W25516235732020 @default.
- W2551623573 countsByYear W25516235732021 @default.
- W2551623573 countsByYear W25516235732022 @default.
- W2551623573 crossrefType "journal-article" @default.
- W2551623573 hasAuthorship W2551623573A5012649127 @default.
- W2551623573 hasAuthorship W2551623573A5012757504 @default.
- W2551623573 hasAuthorship W2551623573A5018296394 @default.
- W2551623573 hasBestOaLocation W25516235731 @default.
- W2551623573 hasConcept C100082104 @default.
- W2551623573 hasConcept C119599485 @default.
- W2551623573 hasConcept C120665830 @default.
- W2551623573 hasConcept C121332964 @default.
- W2551623573 hasConcept C121684516 @default.
- W2551623573 hasConcept C127413603 @default.
- W2551623573 hasConcept C134786449 @default.
- W2551623573 hasConcept C159985019 @default.
- W2551623573 hasConcept C172707124 @default.
- W2551623573 hasConcept C173386949 @default.
- W2551623573 hasConcept C180205008 @default.
- W2551623573 hasConcept C192562407 @default.
- W2551623573 hasConcept C206755178 @default.
- W2551623573 hasConcept C24890656 @default.
- W2551623573 hasConcept C2780357685 @default.
- W2551623573 hasConcept C37977207 @default.
- W2551623573 hasConcept C41008148 @default.
- W2551623573 hasConcept C49040817 @default.
- W2551623573 hasConcept C74650414 @default.
- W2551623573 hasConcept C96035792 @default.
- W2551623573 hasConceptScore W2551623573C100082104 @default.
- W2551623573 hasConceptScore W2551623573C119599485 @default.
- W2551623573 hasConceptScore W2551623573C120665830 @default.
- W2551623573 hasConceptScore W2551623573C121332964 @default.
- W2551623573 hasConceptScore W2551623573C121684516 @default.
- W2551623573 hasConceptScore W2551623573C127413603 @default.
- W2551623573 hasConceptScore W2551623573C134786449 @default.
- W2551623573 hasConceptScore W2551623573C159985019 @default.
- W2551623573 hasConceptScore W2551623573C172707124 @default.
- W2551623573 hasConceptScore W2551623573C173386949 @default.
- W2551623573 hasConceptScore W2551623573C180205008 @default.
- W2551623573 hasConceptScore W2551623573C192562407 @default.
- W2551623573 hasConceptScore W2551623573C206755178 @default.
- W2551623573 hasConceptScore W2551623573C24890656 @default.
- W2551623573 hasConceptScore W2551623573C2780357685 @default.
- W2551623573 hasConceptScore W2551623573C37977207 @default.
- W2551623573 hasConceptScore W2551623573C41008148 @default.
- W2551623573 hasConceptScore W2551623573C49040817 @default.
- W2551623573 hasConceptScore W2551623573C74650414 @default.
- W2551623573 hasConceptScore W2551623573C96035792 @default.
- W2551623573 hasFunder F4320321001 @default.
- W2551623573 hasFunder F4320323085 @default.
- W2551623573 hasIssue "8" @default.
- W2551623573 hasLocation W25516235731 @default.
- W2551623573 hasOpenAccess W2551623573 @default.
- W2551623573 hasPrimaryLocation W25516235731 @default.
- W2551623573 hasRelatedWork W1988264504 @default.
- W2551623573 hasRelatedWork W2011137092 @default.
- W2551623573 hasRelatedWork W2016241863 @default.
- W2551623573 hasRelatedWork W2030024880 @default.
- W2551623573 hasRelatedWork W2107066991 @default.
- W2551623573 hasRelatedWork W2154257732 @default.
- W2551623573 hasRelatedWork W2382370795 @default.
- W2551623573 hasRelatedWork W2970190399 @default.
- W2551623573 hasRelatedWork W3024999058 @default.
- W2551623573 hasRelatedWork W4324332237 @default.
- W2551623573 hasVolume "6" @default.
- W2551623573 isParatext "false" @default.
- W2551623573 isRetracted "false" @default.
- W2551623573 magId "2551623573" @default.
- W2551623573 workType "article" @default.