Matches in SemOpenAlex for { <https://semopenalex.org/work/W2552802038> ?p ?o ?g. }
- W2552802038 endingPage "278" @default.
- W2552802038 startingPage "272" @default.
- W2552802038 abstract "Abstract This work presents the formation of intrinsic and dopant-segregated Schottky barrier nanowire transistors using microwave-annealed silicidation. To gain a sound understanding of applying the microwave annealing on fabricating metallic source/drain nanowire devices, three metals, nickel, ytterbium, and titanium, were utilized to form the Schottky barrier source/drain. Effects of microwave annealing on silicidation as well as segregation were intensively examined by comparing with those using rapid-thermal annealing. The drain current of ytterbium-based examples depend mildly on the applied microwave power from 200–400%, whereas the higher 300% or 400% power is most appropriate to optimize nickel-based nanowire transistors. The maximum 500% power is required on forming titanium silicidation for intrinsic or dopant-segregated nanowire devices. Relatively, temperature of 600 ℃ is required to form the nanowire source/drain with nickel or ytterbium, and temperature of 900 ℃ is needed for titanium-based devices. Experimental results show that the microwave annealing offers low-temperature processing against the rapid-thermal method to ensure favorable device characteristics, serving as a promising approach for 3D integration of CMOS technologies." @default.
- W2552802038 created "2016-11-30" @default.
- W2552802038 creator A5003373506 @default.
- W2552802038 creator A5024672952 @default.
- W2552802038 creator A5029705119 @default.
- W2552802038 creator A5034047524 @default.
- W2552802038 creator A5091292002 @default.
- W2552802038 date "2017-11-01" @default.
- W2552802038 modified "2023-09-27" @default.
- W2552802038 title "Metallic Schottky barrier source/drain nanowire transistors using low-temperature microwave annealed nickel, ytterbium, and titanium silicidation" @default.
- W2552802038 cites W1602021141 @default.
- W2552802038 cites W1971530291 @default.
- W2552802038 cites W1975851231 @default.
- W2552802038 cites W1979225322 @default.
- W2552802038 cites W2013583151 @default.
- W2552802038 cites W2017694187 @default.
- W2552802038 cites W2018870512 @default.
- W2552802038 cites W2023637104 @default.
- W2552802038 cites W2037069379 @default.
- W2552802038 cites W2064930135 @default.
- W2552802038 cites W2082249061 @default.
- W2552802038 cites W2109471502 @default.
- W2552802038 cites W2111577163 @default.
- W2552802038 cites W2121502809 @default.
- W2552802038 cites W2127572386 @default.
- W2552802038 cites W2145361816 @default.
- W2552802038 cites W2150952982 @default.
- W2552802038 cites W2153153432 @default.
- W2552802038 cites W2157679815 @default.
- W2552802038 cites W2161922492 @default.
- W2552802038 cites W2165003161 @default.
- W2552802038 cites W2169546611 @default.
- W2552802038 cites W2213800229 @default.
- W2552802038 doi "https://doi.org/10.1016/j.mssp.2016.11.010" @default.
- W2552802038 hasPublicationYear "2017" @default.
- W2552802038 type Work @default.
- W2552802038 sameAs 2552802038 @default.
- W2552802038 citedByCount "2" @default.
- W2552802038 countsByYear W25528020382020 @default.
- W2552802038 countsByYear W25528020382022 @default.
- W2552802038 crossrefType "journal-article" @default.
- W2552802038 hasAuthorship W2552802038A5003373506 @default.
- W2552802038 hasAuthorship W2552802038A5024672952 @default.
- W2552802038 hasAuthorship W2552802038A5029705119 @default.
- W2552802038 hasAuthorship W2552802038A5034047524 @default.
- W2552802038 hasAuthorship W2552802038A5091292002 @default.
- W2552802038 hasConcept C121332964 @default.
- W2552802038 hasConcept C16115445 @default.
- W2552802038 hasConcept C171250308 @default.
- W2552802038 hasConcept C191897082 @default.
- W2552802038 hasConcept C191952053 @default.
- W2552802038 hasConcept C192562407 @default.
- W2552802038 hasConcept C2777855556 @default.
- W2552802038 hasConcept C44838205 @default.
- W2552802038 hasConcept C49040817 @default.
- W2552802038 hasConcept C504270822 @default.
- W2552802038 hasConcept C506065880 @default.
- W2552802038 hasConcept C545659032 @default.
- W2552802038 hasConcept C57863236 @default.
- W2552802038 hasConcept C62520636 @default.
- W2552802038 hasConcept C74214498 @default.
- W2552802038 hasConcept C78434282 @default.
- W2552802038 hasConceptScore W2552802038C121332964 @default.
- W2552802038 hasConceptScore W2552802038C16115445 @default.
- W2552802038 hasConceptScore W2552802038C171250308 @default.
- W2552802038 hasConceptScore W2552802038C191897082 @default.
- W2552802038 hasConceptScore W2552802038C191952053 @default.
- W2552802038 hasConceptScore W2552802038C192562407 @default.
- W2552802038 hasConceptScore W2552802038C2777855556 @default.
- W2552802038 hasConceptScore W2552802038C44838205 @default.
- W2552802038 hasConceptScore W2552802038C49040817 @default.
- W2552802038 hasConceptScore W2552802038C504270822 @default.
- W2552802038 hasConceptScore W2552802038C506065880 @default.
- W2552802038 hasConceptScore W2552802038C545659032 @default.
- W2552802038 hasConceptScore W2552802038C57863236 @default.
- W2552802038 hasConceptScore W2552802038C62520636 @default.
- W2552802038 hasConceptScore W2552802038C74214498 @default.
- W2552802038 hasConceptScore W2552802038C78434282 @default.
- W2552802038 hasFunder F4320322795 @default.
- W2552802038 hasLocation W25528020381 @default.
- W2552802038 hasOpenAccess W2552802038 @default.
- W2552802038 hasPrimaryLocation W25528020381 @default.
- W2552802038 hasRelatedWork W1565052536 @default.
- W2552802038 hasRelatedWork W1973418109 @default.
- W2552802038 hasRelatedWork W1991393939 @default.
- W2552802038 hasRelatedWork W2012461023 @default.
- W2552802038 hasRelatedWork W2061553607 @default.
- W2552802038 hasRelatedWork W2066809380 @default.
- W2552802038 hasRelatedWork W2075782585 @default.
- W2552802038 hasRelatedWork W2082249061 @default.
- W2552802038 hasRelatedWork W2110880769 @default.
- W2552802038 hasRelatedWork W2111932931 @default.
- W2552802038 hasRelatedWork W2113131083 @default.
- W2552802038 hasRelatedWork W2134980254 @default.
- W2552802038 hasRelatedWork W2137413260 @default.
- W2552802038 hasRelatedWork W2150052750 @default.
- W2552802038 hasRelatedWork W2152857125 @default.
- W2552802038 hasRelatedWork W2165952540 @default.