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- W2553003104 abstract "A hybrid multi-cluster tool is composed of both dual and single-arm robotic tools. Since their behavior is different, it is very challenging to coordinate their activities in such a tool and to schedule it optimally. This work aims at finding such a schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is assumed to be process-bound. Resource-oriented Petri nets are extended to model the system. With the model, this work shows the conditions under which there is a one-wafer cyclic schedule such that the least cycle time can be obtained. An efficient algorithm is proposed then to test the existence of such a schedule and find it if existing. Example is given to illustrate the derived approaches." @default.
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- W2553003104 date "2016-08-01" @default.
- W2553003104 modified "2023-09-27" @default.
- W2553003104 title "Optimal scheduling analysis of treelike hybrid multi-cluster tools" @default.
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- W2553003104 doi "https://doi.org/10.1109/coase.2016.7743573" @default.
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