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- W2553290161 abstract "Abstract Sputtering is an important film deposition method that has been used for the fabrication of thin films used in basic research to the mass production process in factories. However, single-crystalline epitaxial platinum film has not been successfully prepared on yttria-stabilized zirconia (YSZ) (111) substrates by the sputtering method. We have deposited platinum by inductively coupled plasma-assisted sputtering on YSZ(111) with postdeposition annealing at 750–850 °C. As a result, single-crystalline epitaxial films with a root mean square roughness better than 0.2 nm were successfully fabricated." @default.
- W2553290161 created "2016-11-30" @default.
- W2553290161 creator A5014877775 @default.
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- W2553290161 date "2016-11-11" @default.
- W2553290161 modified "2023-10-18" @default.
- W2553290161 title "Single-crystalline epitaxial platinum film on yttrium-stabilized zirconia (111) prepared by sputtering deposition" @default.
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- W2553290161 doi "https://doi.org/10.7567/jjap.55.120304" @default.
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