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• W2553511197 abstract "A Time-of-Flight Mass Spectrometer was developed by modification of a 200kV Ion Im-planter. The time resolution of the 20keV pulsed Ar beam was greatly improved using a part of rising edge of the scanning voltage.Mass distributions of positive and negative microclusters were measured for monocrysta-lline, polycrystalline and amorphous silicon sa microclusters were measured for monocrysta-mass spectra would be strongly related to the structure of the silicon targets." @default.
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• W2553511197 date "1991-01-01" @default.
• W2553511197 modified "2023-09-27" @default.
• W2553511197 title "STRUCTURE EFFECT OF SPUTTERRED SILICON CLUSTERS STUDIED BY MEANS OF TIME-OF-FLIGHT METHOD" @default.
• W2553511197 doi "https://doi.org/10.7498/aps.40.703" @default.
• W2553511197 hasPublicationYear "1991" @default.
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