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- W2553780046 endingPage "3218" @default.
- W2553780046 startingPage "3214" @default.
- W2553780046 abstract "In this paper, tunnel field-effect transistor (TFETs) with polycrystalline-silicon (poly-Si) channel film has been demonstrated to exhibit better short-channel effects (SCEs) immunity than conventional poly-Si thin-film transistors. Oxygen (O2) plasma surface treatment before the deposition of gate dielectric can produce a plasma-induced interfacial layer, which can passivate the interface trap state density ~25%. In addition, the ON-state transconductance $G_{m}$ is improved ~54% due to the decrease of tunneling distance of band-to-band tunneling. However, the $G_{m}$ improvement of poly-Si TFETs is decreased with the scaling down of channel length due to the less trap state density in the small area of poly-Si channel film. Moreover, the O2 plasma surface treatment can also reduce the grain boundary trap state density of poly-Si channel film ~37%, which can reduce the trap-assisted tunneling current of poly-Si TFETs to suppress the length dependence of drain leakage current in the subthreshold region. Consequently, the O2 plasma surface treatment can not only improve the ON-state current and OFF-state leakage current of poly-Si TFETs, but also further improve the SCEs of poly-Si TFETs." @default.
- W2553780046 created "2016-11-30" @default.
- W2553780046 creator A5010952947 @default.
- W2553780046 creator A5028901853 @default.
- W2553780046 creator A5033428926 @default.
- W2553780046 creator A5053662503 @default.
- W2553780046 date "2016-12-01" @default.
- W2553780046 modified "2023-09-26" @default.
- W2553780046 title "Plasma-Induced Interfacial Layer Impacts on TFETs With Poly-Si Channel Film by Oxygen Plasma Surface Treatment" @default.
- W2553780046 cites W1544610536 @default.
- W2553780046 cites W1610555798 @default.
- W2553780046 cites W1911668581 @default.
- W2553780046 cites W1965944943 @default.
- W2553780046 cites W1966189957 @default.
- W2553780046 cites W1966227433 @default.
- W2553780046 cites W1969830386 @default.
- W2553780046 cites W1977420224 @default.
- W2553780046 cites W1980346848 @default.
- W2553780046 cites W2009624223 @default.
- W2553780046 cites W2018595821 @default.
- W2553780046 cites W2023766124 @default.
- W2553780046 cites W2032197740 @default.
- W2553780046 cites W2040667668 @default.
- W2553780046 cites W2041315526 @default.
- W2553780046 cites W2058139808 @default.
- W2553780046 cites W2058695311 @default.
- W2553780046 cites W2064323891 @default.
- W2553780046 cites W2068750756 @default.
- W2553780046 cites W2070844778 @default.
- W2553780046 cites W2082632364 @default.
- W2553780046 cites W2100867135 @default.
- W2553780046 cites W2129216311 @default.
- W2553780046 cites W2166623356 @default.
- W2553780046 cites W2249579399 @default.
- W2553780046 cites W2310817922 @default.
- W2553780046 cites W2324769161 @default.
- W2553780046 cites W2137007701 @default.
- W2553780046 doi "https://doi.org/10.1109/tps.2016.2621056" @default.
- W2553780046 hasPublicationYear "2016" @default.
- W2553780046 type Work @default.
- W2553780046 sameAs 2553780046 @default.
- W2553780046 citedByCount "6" @default.
- W2553780046 countsByYear W25537800462018 @default.
- W2553780046 countsByYear W25537800462019 @default.
- W2553780046 countsByYear W25537800462021 @default.
- W2553780046 countsByYear W25537800462023 @default.
- W2553780046 crossrefType "journal-article" @default.
- W2553780046 hasAuthorship W2553780046A5010952947 @default.
- W2553780046 hasAuthorship W2553780046A5028901853 @default.
- W2553780046 hasAuthorship W2553780046A5033428926 @default.
- W2553780046 hasAuthorship W2553780046A5053662503 @default.
- W2553780046 hasConcept C121332964 @default.
- W2553780046 hasConcept C171250308 @default.
- W2553780046 hasConcept C178790620 @default.
- W2553780046 hasConcept C185592680 @default.
- W2553780046 hasConcept C192562407 @default.
- W2553780046 hasConcept C2779227376 @default.
- W2553780046 hasConcept C49040817 @default.
- W2553780046 hasConcept C540031477 @default.
- W2553780046 hasConcept C62520636 @default.
- W2553780046 hasConcept C82706917 @default.
- W2553780046 hasConceptScore W2553780046C121332964 @default.
- W2553780046 hasConceptScore W2553780046C171250308 @default.
- W2553780046 hasConceptScore W2553780046C178790620 @default.
- W2553780046 hasConceptScore W2553780046C185592680 @default.
- W2553780046 hasConceptScore W2553780046C192562407 @default.
- W2553780046 hasConceptScore W2553780046C2779227376 @default.
- W2553780046 hasConceptScore W2553780046C49040817 @default.
- W2553780046 hasConceptScore W2553780046C540031477 @default.
- W2553780046 hasConceptScore W2553780046C62520636 @default.
- W2553780046 hasConceptScore W2553780046C82706917 @default.
- W2553780046 hasIssue "12" @default.
- W2553780046 hasLocation W25537800461 @default.
- W2553780046 hasOpenAccess W2553780046 @default.
- W2553780046 hasPrimaryLocation W25537800461 @default.
- W2553780046 hasRelatedWork W2058676402 @default.
- W2553780046 hasRelatedWork W2059363835 @default.
- W2553780046 hasRelatedWork W2139871202 @default.
- W2553780046 hasRelatedWork W2292675962 @default.
- W2553780046 hasRelatedWork W2329285141 @default.
- W2553780046 hasRelatedWork W2399397734 @default.
- W2553780046 hasRelatedWork W2509384934 @default.
- W2553780046 hasRelatedWork W2902546961 @default.
- W2553780046 hasRelatedWork W2961581639 @default.
- W2553780046 hasRelatedWork W3127524829 @default.
- W2553780046 hasVolume "44" @default.
- W2553780046 isParatext "false" @default.
- W2553780046 isRetracted "false" @default.
- W2553780046 magId "2553780046" @default.
- W2553780046 workType "article" @default.