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- W2554300797 abstract "Here, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids." @default.
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- W2554300797 date "2016-11-09" @default.
- W2554300797 modified "2023-09-27" @default.
- W2554300797 title "Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar" @default.
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- W2554300797 doi "https://doi.org/10.3390/s16111880" @default.
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