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- W255483578 abstract "Aluminium oxide (AlO x ) thin film was grown using aluminium acetylacetonate (AlAcac 3 ) as a source solute by mist chemical vapour deposition (CVD). The AlO x thin film grown at 430°C exhibited the breakdown field (E BD ) and the dielectric constant (k) of 5.9 MV/cm and 6.8, respectively. It was suggested that the formation of boehmite (γ-AlO(OH)) in the films decreased the E BD of AlO x thin films at the growth temperatures below 350°C. In the mist CVD, the reaction proceeded efficiently (E a = 23.5–26 kJ/mol) under the evaporated solvent atmosphere. The AlO x film was able to be grown at 430°C with high deposition ratio (18 nm/min) and smooth surface (RMS =1.6 nm)." @default.
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- W255483578 date "2012-07-04" @default.
- W255483578 modified "2023-09-27" @default.
- W255483578 title "Structural and electrical properties of Al 2 O 3 film grown by mist chemical vapour deposition" @default.
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