FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2554865666> ?p ?o ?g. }

• W2554865666 endingPage "932" @default.
• W2554865666 startingPage "926" @default.
• W2554865666 abstract "Being a key issue in the research and fabrication of silicon heterojunction (SHJ) solar cells, crystalline silicon (c-Si) surface passivation is theoretically and technologically intricate due to its complicate dependence on plasma characteristics, material properties, and plasma-material interactions. Here amorphous silicon (a-Si:H) grown by a planar inductively coupled plasma (ICP) reactor working under different antenna-substrate distances of d was used for the surface passivation of low-resistivity p-type c-Si. It is found that the microstructures (i.e., the crystallinity, Si-H bonding configuration etc.) and passivation function on c-Si of the deposited a-Si:H were profoundly influenced by the parameter of d, which primarily determines the types of growing precursors of SiHn/H contributing to the film growth and the interaction between the plasma and growing surface. c-Si surface passivation is analyzed in terms of the d-dependent a-Si:H properties and plasma characteristics. The controlling of radical types and ion bombardment on the growing surface through adjusting parameter d is emphasized." @default.
• W2554865666 created "2016-11-30" @default.
• W2554865666 creator A5017782182 @default.
• W2554865666 creator A5020174269 @default.
• W2554865666 creator A5046824735 @default.
• W2554865666 creator A5051463344 @default.
• W2554865666 creator A5059842894 @default.
• W2554865666 creator A5064994448 @default.
• W2554865666 creator A5083107600 @default.
• W2554865666 date "2017-02-01" @default.
• W2554865666 modified "2023-10-14" @default.
• W2554865666 title "Radicals and ions controlling by adjusting the antenna-substrate distance in a-Si:H deposition using a planar ICP for c-Si surface passivation" @default.
• W2554865666 cites W1966295759 @default.
• W2554865666 cites W1976344960 @default.
• W2554865666 cites W1976757339 @default.
• W2554865666 cites W2008561304 @default.
• W2554865666 cites W2014779783 @default.
• W2554865666 cites W2019764281 @default.
• W2554865666 cites W2023478718 @default.
• W2554865666 cites W2027000376 @default.
• W2554865666 cites W2027238198 @default.
• W2554865666 cites W2031416310 @default.
• W2554865666 cites W2033193531 @default.
• W2554865666 cites W2040854129 @default.
• W2554865666 cites W2042937424 @default.
• W2554865666 cites W2052087580 @default.
• W2554865666 cites W2060886159 @default.
• W2554865666 cites W2070606589 @default.
• W2554865666 cites W2073168892 @default.
• W2554865666 cites W2075179406 @default.
• W2554865666 cites W2078900749 @default.
• W2554865666 cites W2080003286 @default.
• W2554865666 cites W2083862700 @default.
• W2554865666 cites W2091781784 @default.
• W2554865666 cites W2101374130 @default.
• W2554865666 cites W2121958869 @default.
• W2554865666 cites W2126808884 @default.
• W2554865666 cites W2137072811 @default.
• W2554865666 cites W2144571284 @default.
• W2554865666 cites W2145195212 @default.
• W2554865666 cites W2152778117 @default.
• W2554865666 doi "https://doi.org/10.1016/j.apsusc.2016.11.063" @default.
• W2554865666 hasPublicationYear "2017" @default.
• W2554865666 type Work @default.
• W2554865666 sameAs 2554865666 @default.
• W2554865666 citedByCount "4" @default.
• W2554865666 countsByYear W25548656662017 @default.
• W2554865666 countsByYear W25548656662019 @default.
• W2554865666 countsByYear W25548656662021 @default.
• W2554865666 crossrefType "journal-article" @default.
• W2554865666 hasAuthorship W2554865666A5017782182 @default.
• W2554865666 hasAuthorship W2554865666A5020174269 @default.
• W2554865666 hasAuthorship W2554865666A5046824735 @default.
• W2554865666 hasAuthorship W2554865666A5051463344 @default.
• W2554865666 hasAuthorship W2554865666A5059842894 @default.
• W2554865666 hasAuthorship W2554865666A5064994448 @default.
• W2554865666 hasAuthorship W2554865666A5083107600 @default.
• W2554865666 hasBestOaLocation W25548656661 @default.
• W2554865666 hasConcept C111368507 @default.
• W2554865666 hasConcept C113196181 @default.
• W2554865666 hasConcept C121332964 @default.
• W2554865666 hasConcept C127313418 @default.
• W2554865666 hasConcept C159985019 @default.
• W2554865666 hasConcept C171250308 @default.
• W2554865666 hasConcept C185592680 @default.
• W2554865666 hasConcept C192562407 @default.
• W2554865666 hasConcept C2776390347 @default.
• W2554865666 hasConcept C2777289219 @default.
• W2554865666 hasConcept C2779227376 @default.
• W2554865666 hasConcept C2779667780 @default.
• W2554865666 hasConcept C33574316 @default.
• W2554865666 hasConcept C38347018 @default.
• W2554865666 hasConcept C43617362 @default.
• W2554865666 hasConcept C46275449 @default.
• W2554865666 hasConcept C49040817 @default.
• W2554865666 hasConcept C544956773 @default.
• W2554865666 hasConcept C56052488 @default.
• W2554865666 hasConcept C62520636 @default.
• W2554865666 hasConcept C79794668 @default.
• W2554865666 hasConcept C8010536 @default.
• W2554865666 hasConcept C82706917 @default.
• W2554865666 hasConcept C95974651 @default.
• W2554865666 hasConceptScore W2554865666C111368507 @default.
• W2554865666 hasConceptScore W2554865666C113196181 @default.
• W2554865666 hasConceptScore W2554865666C121332964 @default.
• W2554865666 hasConceptScore W2554865666C127313418 @default.
• W2554865666 hasConceptScore W2554865666C159985019 @default.
• W2554865666 hasConceptScore W2554865666C171250308 @default.
• W2554865666 hasConceptScore W2554865666C185592680 @default.
• W2554865666 hasConceptScore W2554865666C192562407 @default.
• W2554865666 hasConceptScore W2554865666C2776390347 @default.
• W2554865666 hasConceptScore W2554865666C2777289219 @default.
• W2554865666 hasConceptScore W2554865666C2779227376 @default.
• W2554865666 hasConceptScore W2554865666C2779667780 @default.
• W2554865666 hasConceptScore W2554865666C33574316 @default.
• W2554865666 hasConceptScore W2554865666C38347018 @default.
• W2554865666 hasConceptScore W2554865666C43617362 @default.
• W2554865666 hasConceptScore W2554865666C46275449 @default.

• next