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- W2555445414 abstract "The chip temperature influence on the hydrogen sensitivity of the metal-insulator- semiconductor field-effect transistor (MISFET) with structure Pd-Ta2O5-SiO2-Si was investigated. MISFET sensing element was integrated on silicon chip together with (p-n)- junction temperature sensor and heater-resistor. There were measured the hydrogen responses of the MISFET threshold voltage for room and higher chip temperatures. The threshold voltage VT as a function of hydrogen concentration C was determined for different temperatures T. The models of hydrogen and temperature sensitivities based on the experimental dependencies of VT (C, T) are presented in this work." @default.
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- W2555445414 date "2016-10-01" @default.
- W2555445414 modified "2023-09-23" @default.
- W2555445414 title "Influence of chip temperature on the hydrogen sensitivity of MISFET-based sensors" @default.
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- W2555445414 doi "https://doi.org/10.1088/1757-899x/151/1/012007" @default.
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