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• W2555583701 abstract "Inductively coupled plasma system (ICPs) is extensively used for a wide range of nanofabrication applications. The ICPs operated in a pulsed or power modulated mode has shown several advantages compared to the continuous discharge. In this work, the plasma dynamics in a planar coil pulsed inductively coupled plasma system (ICPs) operated in oxygen has been investigated, using phase and space resolved optical emission spectroscopy. It is well-known that the ICPs operates in two distinct operational modes as a function of power known as E and H modes, generated dominantly by capacitive and inductive couplings, respectively. The measurements show that the discharge ignites due a capacitive coupling (in the E-mode) and later transits to the H-mode as a function of time. The inductive coupling, however, starts during the E-mode along with capacitive coupling. The relative contribution of inductive coupling increases until the discharge reaches the E-H transition where the growth rate of inductive coupling becomes much faster. It is found that the time to reach E-H transition decreases with the pressure. At the E-H transition, the total emission has a spike-like feature (i.e., it first achieves a peak emission which later decreases and finally settles to a lower value). The 2D images of the discharge show that at the time of peak total-emission, the discharge structure is sharp and bright, which later decreases in brightness and becomes diffusive." @default.
• W2555583701 created "2016-11-30" @default.
• W2555583701 creator A5007390718 @default.
• W2555583701 date "2016-11-01" @default.
• W2555583701 modified "2023-09-27" @default.
• W2555583701 title "Dynamics of a pulsed inductively coupled oxygen plasma" @default.
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• W2555583701 doi "https://doi.org/10.1063/1.4967769" @default.
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