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• W2557346159 abstract "This work addresses on the fabrication of ion-sensitive field-effect transistors with the multiple Ω-shape nano-channels. The Ω-shaped channels with the width/space about 1∶1, 200/200 nm, were fabricated by the thermal nanoimprint lithography and the anisotropic/isotropic dry etching processes. The sensing properties of proposed ISFETs were studied and compared with the conventional single channel ones. With this approach, the high-performance ISFETs can be fabricated for future biosensor applications." @default.
• W2557346159 created "2016-12-08" @default.
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• W2557346159 date "2016-08-01" @default.
• W2557346159 modified "2023-09-26" @default.
• W2557346159 title "Ion-sensitive field-effect transistors with multiple Ω-shaped nano channels fabricated by nanoimprint lithography and NEMS process" @default.
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• W2557346159 doi "https://doi.org/10.1109/nano.2016.7751559" @default.
• W2557346159 hasPublicationYear "2016" @default.
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