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• W2559397157 abstract "Ultrathin Hf-Ti-O higher k gate dielectric films (~2.55 nm) have been prepared by atomic layer deposition. Their electrical properties and application in ETSOI (fully depleted extremely thin SOI) PMOSFETs were studied. It is found that at the Ti concentration of Ti/(Ti + Hf) ~9.4%, low equivalent gate oxide thickness (EOT) of ~0.69 nm and acceptable gate leakage current density of 0.61 A/cm2 @ (V fb − 1)V could be obtained. The conduction mechanism through the gate dielectric is dominated by the F-N tunneling in the gate voltage range of −0.5 to −2 V. Under the same physical thickness and process flow, lower EOT and higher I on/I off ratio could be obtained while using Hf-Ti-O as gate dielectric compared with HfO2. With Hf-Ti-O as gate dielectric, two ETSOI PMOSFETs with gate width/gate length (W/L) of 0.5 μm/25 nm and 3 μm/40 nm show good performances such as high I on, I on/I off ratio in the magnitude of 105, and peak transconductance, as well as suitable threshold voltage (−0.3~−0.2 V). Particularly, ETSOI PMOSFETs show superior short-channel control capacity with DIBL <82 mV/V and subthreshold swing <70 mV/decade." @default.
• W2559397157 created "2016-12-08" @default.
• W2559397157 creator A5008456036 @default.
• W2559397157 creator A5008677696 @default.
• W2559397157 creator A5024729319 @default.
• W2559397157 creator A5030120711 @default.
• W2559397157 creator A5031478883 @default.
• W2559397157 creator A5037691180 @default.
• W2559397157 creator A5041925148 @default.
• W2559397157 creator A5090531383 @default.
• W2559397157 creator A5090789682 @default.
• W2559397157 date "2016-11-30" @default.
• W2559397157 modified "2023-10-06" @default.
• W2559397157 title "Electrical Properties of Ultrathin Hf-Ti-O Higher k Gate Dielectric Films and Their Application in ETSOI MOSFET" @default.
• W2559397157 cites W1488802335 @default.
• W2559397157 cites W1498212134 @default.
• W2559397157 cites W1634198957 @default.
• W2559397157 cites W1678335860 @default.
• W2559397157 cites W1967798986 @default.
• W2559397157 cites W1978139469 @default.
• W2559397157 cites W2001894083 @default.
• W2559397157 cites W2003645630 @default.
• W2559397157 cites W2009094207 @default.
• W2559397157 cites W2014198284 @default.
• W2559397157 cites W2058108553 @default.
• W2559397157 cites W2058571189 @default.
• W2559397157 cites W2066017451 @default.
• W2559397157 cites W2076750356 @default.
• W2559397157 cites W2078583406 @default.
• W2559397157 cites W2080344609 @default.
• W2559397157 cites W2123821392 @default.
• W2559397157 cites W2292209225 @default.
• W2559397157 cites W2394524970 @default.
• W2559397157 cites W30667999 @default.
• W2559397157 doi "https://doi.org/10.1186/s11671-016-1754-5" @default.
• W2559397157 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/5130927" @default.
• W2559397157 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/27905095" @default.
• W2559397157 hasPublicationYear "2016" @default.
• W2559397157 type Work @default.
• W2559397157 sameAs 2559397157 @default.
• W2559397157 citedByCount "3" @default.
• W2559397157 countsByYear W25593971572017 @default.
• W2559397157 countsByYear W25593971572021 @default.
• W2559397157 countsByYear W25593971572022 @default.
• W2559397157 crossrefType "journal-article" @default.
• W2559397157 hasAuthorship W2559397157A5008456036 @default.
• W2559397157 hasAuthorship W2559397157A5008677696 @default.
• W2559397157 hasAuthorship W2559397157A5024729319 @default.
• W2559397157 hasAuthorship W2559397157A5030120711 @default.
• W2559397157 hasAuthorship W2559397157A5031478883 @default.
• W2559397157 hasAuthorship W2559397157A5037691180 @default.
• W2559397157 hasAuthorship W2559397157A5041925148 @default.
• W2559397157 hasAuthorship W2559397157A5090531383 @default.
• W2559397157 hasAuthorship W2559397157A5090789682 @default.
• W2559397157 hasBestOaLocation W25593971571 @default.
• W2559397157 hasConcept C119599485 @default.
• W2559397157 hasConcept C127413603 @default.
• W2559397157 hasConcept C133386390 @default.
• W2559397157 hasConcept C16317505 @default.
• W2559397157 hasConcept C165801399 @default.
• W2559397157 hasConcept C166972891 @default.
• W2559397157 hasConcept C171250308 @default.
• W2559397157 hasConcept C172385210 @default.
• W2559397157 hasConcept C192562407 @default.
• W2559397157 hasConcept C195370968 @default.
• W2559397157 hasConcept C2361726 @default.
• W2559397157 hasConcept C2778413303 @default.
• W2559397157 hasConcept C2779227376 @default.
• W2559397157 hasConcept C2779283907 @default.
• W2559397157 hasConcept C49040817 @default.
• W2559397157 hasConcept C51140833 @default.
• W2559397157 hasConcept C52780932 @default.
• W2559397157 hasConcept C69544855 @default.
• W2559397157 hasConceptScore W2559397157C119599485 @default.
• W2559397157 hasConceptScore W2559397157C127413603 @default.
• W2559397157 hasConceptScore W2559397157C133386390 @default.
• W2559397157 hasConceptScore W2559397157C16317505 @default.
• W2559397157 hasConceptScore W2559397157C165801399 @default.
• W2559397157 hasConceptScore W2559397157C166972891 @default.
• W2559397157 hasConceptScore W2559397157C171250308 @default.
• W2559397157 hasConceptScore W2559397157C172385210 @default.
• W2559397157 hasConceptScore W2559397157C192562407 @default.
• W2559397157 hasConceptScore W2559397157C195370968 @default.
• W2559397157 hasConceptScore W2559397157C2361726 @default.
• W2559397157 hasConceptScore W2559397157C2778413303 @default.
• W2559397157 hasConceptScore W2559397157C2779227376 @default.
• W2559397157 hasConceptScore W2559397157C2779283907 @default.
• W2559397157 hasConceptScore W2559397157C49040817 @default.
• W2559397157 hasConceptScore W2559397157C51140833 @default.
• W2559397157 hasConceptScore W2559397157C52780932 @default.
• W2559397157 hasConceptScore W2559397157C69544855 @default.
• W2559397157 hasFunder F4320321001 @default.
• W2559397157 hasIssue "1" @default.
• W2559397157 hasLocation W25593971571 @default.
• W2559397157 hasLocation W25593971572 @default.
• W2559397157 hasLocation W25593971573 @default.
• W2559397157 hasLocation W25593971574 @default.
• W2559397157 hasOpenAccess W2559397157 @default.
• W2559397157 hasPrimaryLocation W25593971571 @default.
• W2559397157 hasRelatedWork W1155936829 @default.

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