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- W2560714775 abstract "EUV lithography remains the preferred option for 7-nm node semiconductor device manufacturing. Successful insertion of this technology into manufacturing, however, will also depend on the development and deployment of new EUV actinic metrologies. Here we describe the metrology needs and status of such systems and the critical components they require." @default.
- W2560714775 created "2016-12-16" @default.
- W2560714775 creator A5003343236 @default.
- W2560714775 date "2016-01-01" @default.
- W2560714775 modified "2023-09-23" @default.
- W2560714775 title "Metrologies Supporting EUV Lithography" @default.
- W2560714775 doi "https://doi.org/10.1364/cleo_at.2016.am2k.1" @default.
- W2560714775 hasPublicationYear "2016" @default.
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