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- W2561566118 abstract "Al-containing hydrogenated amorphous carbon (Al–C :H) films were deposited on silicon substrates using a mid frequency magnetron sputtering Al target in an argon and methane gas mixture. The composition, surfacemorphology, hardness and friction coefficient of the films were characterized using x-ray photoelectron spectroscopy, atomic force microscopy, nanoindentation and tribological tester. The Al–C :H filmsdeposited at low CH4 content show high surface roughness, low hardness and high friction coefficient, similar to metallic Al films; in contrast, the Al–C :H films prepared under high CH4 content indicate low surface roughness, high hardness and low friction coefficient, close to that of hard a-C :H films as wear-resistance films." @default.
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- W2561566118 date "2007-01-01" @default.
- W2561566118 modified "2023-09-24" @default.
- W2561566118 title "The preparation and mechanical properties of Al-containing a-C:H thin films" @default.
- W2561566118 hasPublicationYear "2007" @default.
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