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- W2561817339 abstract "The thermal analysis of a fully integrated micro-switch for surety applications will be presented. Specifically, this study focuses on the temperature increase of a micromachined optical shutter with spot heating from a solid-state laser. To analyze the shutter response, a design-to-analysis interface has been developed that generates an accurate three-dimensional (3-D) solid geometry from the two-dimensional (2-D) mask layout. By building the design-to-analysis interface, engineers can use this solid modeler to virtually prototype and verify a design, and to simulate the performance of micro-devices before fabrication. To determine the effects of thermal conductivity and contact resistance on the thermal response of this passively cooled device, a sensitivity study is also performed." @default.
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- W2561817339 date "2003-06-01" @default.
- W2561817339 modified "2023-10-14" @default.
- W2561817339 title "Investigating the thermal response of a micro-optical shutter" @default.
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- W2561817339 doi "https://doi.org/10.1109/tcapt.2003.815095" @default.
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