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• W2561855166 endingPage "77" @default.
• W2561855166 startingPage "71" @default.
• W2561855166 abstract "Abstract Hydrogenated amorphous silicon carbide (a-SiC:H) films, which contain sp 3 hybridized carbon phase embedded in a-SiC:H matrix were fabricated by a radio frequency (13.56 MHz) plasma enhanced chemical vapor deposition (PECVD) system with methane and silane mixture (silane diluted by H 2 , volume ratio: 90% H 2  + 10% SiH 4 ) as reactive precursor gases. It was found that under the deposition conditions of fixed the RF power density, pressure, deposition temperature and silane mixture flow rate, the flow rate of methane (R) had a large impact on the content of sp 3 hybridized carbon phase and surface morphology of the a-SiC:H thin films. The research shows that the silicon bonding environment didn't change with increasing R and the H bonded to sp 3 hybridized carbon phase mainly derived from the CH n radicals generated by decomposition of CH 4 rather than H 2 . Simultaneously, the methane flow rates can control the deposition rate and surface morphology of the a-SiC:H films and make the films become more compact and uniform." @default.
• W2561855166 created "2017-01-06" @default.
• W2561855166 creator A5001179154 @default.
• W2561855166 creator A5036336633 @default.
• W2561855166 creator A5056438307 @default.
• W2561855166 creator A5087406612 @default.
• W2561855166 date "2017-01-01" @default.
• W2561855166 modified "2023-10-08" @default.
• W2561855166 title "The influence of methane flow rate on microstructure and surface morphology of a-SiC:H thin films prepared by plasma enhanced chemical vapor deposition technique" @default.
• W2561855166 cites W1409760557 @default.
• W2561855166 cites W1622473631 @default.
• W2561855166 cites W1976454183 @default.
• W2561855166 cites W1981363440 @default.
• W2561855166 cites W1991543110 @default.
• W2561855166 cites W1992330120 @default.
• W2561855166 cites W1992736123 @default.
• W2561855166 cites W1994892863 @default.
• W2561855166 cites W2010741662 @default.
• W2561855166 cites W2014690556 @default.
• W2561855166 cites W2019473763 @default.
• W2561855166 cites W2030142598 @default.
• W2561855166 cites W2034865359 @default.
• W2561855166 cites W2037480367 @default.
• W2561855166 cites W2042570283 @default.
• W2561855166 cites W2053220049 @default.
• W2561855166 cites W2061220808 @default.
• W2561855166 cites W2061281559 @default.
• W2561855166 cites W2063966916 @default.
• W2561855166 cites W2071480900 @default.
• W2561855166 cites W2077751750 @default.
• W2561855166 cites W2077797017 @default.
• W2561855166 cites W2080587881 @default.
• W2561855166 cites W2089973178 @default.
• W2561855166 cites W2094975927 @default.
• W2561855166 cites W2170819774 @default.
• W2561855166 cites W2217692482 @default.
• W2561855166 cites W2237422000 @default.
• W2561855166 cites W2347203362 @default.
• W2561855166 cites W2414313245 @default.
• W2561855166 cites W2623356816 @default.
• W2561855166 cites W4246651356 @default.
• W2561855166 cites W834991540 @default.
• W2561855166 doi "https://doi.org/10.1016/j.tsf.2016.12.027" @default.
• W2561855166 hasPublicationYear "2017" @default.
• W2561855166 type Work @default.
• W2561855166 sameAs 2561855166 @default.
• W2561855166 citedByCount "22" @default.
• W2561855166 countsByYear W25618551662017 @default.
• W2561855166 countsByYear W25618551662018 @default.
• W2561855166 countsByYear W25618551662019 @default.
• W2561855166 countsByYear W25618551662020 @default.
• W2561855166 countsByYear W25618551662022 @default.
• W2561855166 countsByYear W25618551662023 @default.
• W2561855166 crossrefType "journal-article" @default.
• W2561855166 hasAuthorship W2561855166A5001179154 @default.
• W2561855166 hasAuthorship W2561855166A5036336633 @default.
• W2561855166 hasAuthorship W2561855166A5056438307 @default.
• W2561855166 hasAuthorship W2561855166A5087406612 @default.
• W2561855166 hasConcept C121332964 @default.
• W2561855166 hasConcept C127413603 @default.
• W2561855166 hasConcept C151730666 @default.
• W2561855166 hasConcept C159985019 @default.
• W2561855166 hasConcept C171250308 @default.
• W2561855166 hasConcept C172120300 @default.
• W2561855166 hasConcept C178790620 @default.
• W2561855166 hasConcept C183866003 @default.
• W2561855166 hasConcept C185592680 @default.
• W2561855166 hasConcept C19067145 @default.
• W2561855166 hasConcept C192562407 @default.
• W2561855166 hasConcept C2816523 @default.
• W2561855166 hasConcept C38347018 @default.
• W2561855166 hasConcept C42360764 @default.
• W2561855166 hasConcept C499950583 @default.
• W2561855166 hasConcept C516920438 @default.
• W2561855166 hasConcept C54355233 @default.
• W2561855166 hasConcept C57410435 @default.
• W2561855166 hasConcept C62520636 @default.
• W2561855166 hasConcept C64297162 @default.
• W2561855166 hasConcept C75937256 @default.
• W2561855166 hasConcept C82706917 @default.
• W2561855166 hasConcept C86803240 @default.
• W2561855166 hasConcept C87976508 @default.
• W2561855166 hasConceptScore W2561855166C121332964 @default.
• W2561855166 hasConceptScore W2561855166C127413603 @default.
• W2561855166 hasConceptScore W2561855166C151730666 @default.
• W2561855166 hasConceptScore W2561855166C159985019 @default.
• W2561855166 hasConceptScore W2561855166C171250308 @default.
• W2561855166 hasConceptScore W2561855166C172120300 @default.
• W2561855166 hasConceptScore W2561855166C178790620 @default.
• W2561855166 hasConceptScore W2561855166C183866003 @default.
• W2561855166 hasConceptScore W2561855166C185592680 @default.
• W2561855166 hasConceptScore W2561855166C19067145 @default.
• W2561855166 hasConceptScore W2561855166C192562407 @default.
• W2561855166 hasConceptScore W2561855166C2816523 @default.
• W2561855166 hasConceptScore W2561855166C38347018 @default.
• W2561855166 hasConceptScore W2561855166C42360764 @default.
• W2561855166 hasConceptScore W2561855166C499950583 @default.
• W2561855166 hasConceptScore W2561855166C516920438 @default.

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