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- W2562080376 abstract "Verticallyalignedcarbonnanotubes(VACNTs)arepromisingcandidates asverticalinterconnectsinmultilayersubstrates. Therefore, VACNTs were applied to the via structure in a multilayer flexible substrate as flexible bumps by surface activated bonding indeed. During the manufacturing process, VACNT bumps were compressed and deformed by the bonding pressure. In this research, VANCT deformation and structural mechanics were evaluated and analyzed under compression by an indenter. VACNT bumps were compressed to about 20% of their original height as multiple VACNT bundles folded under pressure more than 0.40 MPa. The VACNT compression height depended on the bonding pressure, which was within the range 0.04 to 0.20 MPa. Moreover, it was concluded that friction force between neighboring VACNTs caused plastic deformation of the VACNT bundles. © The Author(s) 2016. Published by ECS. This is an open access article distributed under the terms of the Creative Commons Attribution 4.0 License (CC BY, http://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse of the work in any" @default.
- W2562080376 created "2017-01-06" @default.
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- W2562080376 date "2014-08-14" @default.
- W2562080376 modified "2023-10-02" @default.
- W2562080376 title "Contact Behavior among Vertical Aligned Carbon Nanotube Bumps under Compression for Flexible Multilayer Substrates" @default.
- W2562080376 cites W2061301711 @default.
- W2562080376 doi "https://doi.org/10.1149/06405.0021ecst" @default.
- W2562080376 hasPublicationYear "2014" @default.
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