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- W2562199024 abstract "VOx microbolometer, which is coupled with thin-film spiral antenna, was fabricated on a Si 3 N 4 /SiO 2 membrane by metal-organic decomposition (MOD). The DC sensitivity of the device was 3120 W−1 and this value is about two orders of magnitude higher than that of the Bi bolometer fabricated on a dielectric substrate. The responsivity of the device was 370 V/W at 190 GHz for Ib = 50 μA." @default.
- W2562199024 created "2017-01-06" @default.
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- W2562199024 date "2016-09-01" @default.
- W2562199024 modified "2023-10-03" @default.
- W2562199024 title "Detection properties of VO<inf>x</inf> microbolometer on Si<inf>3</inf>N<inf>4</inf>/SiO<inf>2</inf> membrane fabricated by MOD at 200 GHz band" @default.
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- W2562199024 doi "https://doi.org/10.1109/irmmw-thz.2016.7758929" @default.
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