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- W2562970684 abstract "Next generation Si IC transistors, i.e. the 65 nm node, will require ultra-shallow doped regions with depths less than 17 nm and concentrations high enough to get a sheet resistance, Rs, lower than 760 ohms/square [1]. The current state of implant technology, taking into account reasonable throughput and cost considerations, results in as-implanted junction profiles that are slightly shallower than this 17 nm limit. Therefore, to meet the requirements, the subsequent thermal anneal process must result in very little net diffusion while activating the implanted dopants and repairing the implant damage. One" @default.
- W2562970684 created "2017-01-06" @default.
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- W2562970684 date "2002-01-01" @default.
- W2562970684 modified "2023-09-23" @default.
- W2562970684 title "MILLISECOND MICROWAVE ANNEALING OF ULTRA-SHALLOW BORON DOPED SILICON" @default.
- W2562970684 hasPublicationYear "2002" @default.
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