Matches in SemOpenAlex for { <https://semopenalex.org/work/W2563628046> ?p ?o ?g. }
- W2563628046 endingPage "C168" @default.
- W2563628046 startingPage "C168" @default.
- W2563628046 abstract "Silicon oxynitride films were deposited by reactive pulsed magnetron sputtering. The optical, structural, and mechanical properties of silicon oxynitride films with different nitrogen proportions were analyzed via spectroscopy, atomic force microscopy, Twyman-Green interferometer, and nanoindentation. The refractive indices of the silicon oxynitride films were adjusted from 1.487 to 1.956 with the increase in nitrogen proportions. The surface roughness decreased from 1.33 to 0.97 nm with the increase in nitrogen proportions. The residual stress of the silicon oxynitride films was higher than for pure silicon nitride and silicon dioxide films. The hardness and Young's modulus increased from 13.51 to 19.74 GPa and 110.41 to 140.49 GPa with the increase in nitrogen proportions, respectively. The hardness and Young's modulus of antireflection coatings using silicon oxynitride film were 13.64 GPa and 102.11 GPa, respectively. Silicon oxynitride film could be used to improve the hardness of antireflective coatings." @default.
- W2563628046 created "2017-01-06" @default.
- W2563628046 creator A5004203748 @default.
- W2563628046 creator A5026444920 @default.
- W2563628046 creator A5068385330 @default.
- W2563628046 creator A5073249235 @default.
- W2563628046 creator A5082317831 @default.
- W2563628046 date "2016-12-20" @default.
- W2563628046 modified "2023-10-18" @default.
- W2563628046 title "Optical, structural, and mechanical properties of silicon oxynitride films prepared by pulsed magnetron sputtering" @default.
- W2563628046 cites W1635540212 @default.
- W2563628046 cites W182859352 @default.
- W2563628046 cites W1966872273 @default.
- W2563628046 cites W1971171373 @default.
- W2563628046 cites W1977049788 @default.
- W2563628046 cites W1977117277 @default.
- W2563628046 cites W1993801373 @default.
- W2563628046 cites W2000282371 @default.
- W2563628046 cites W2005309075 @default.
- W2563628046 cites W2006309075 @default.
- W2563628046 cites W2012914862 @default.
- W2563628046 cites W2020388978 @default.
- W2563628046 cites W2023252828 @default.
- W2563628046 cites W2029633879 @default.
- W2563628046 cites W2052354323 @default.
- W2563628046 cites W2056164119 @default.
- W2563628046 cites W2062427792 @default.
- W2563628046 cites W2065121858 @default.
- W2563628046 cites W2066707432 @default.
- W2563628046 cites W2066874036 @default.
- W2563628046 cites W2081842119 @default.
- W2563628046 cites W2082898694 @default.
- W2563628046 cites W2084031075 @default.
- W2563628046 cites W2084606209 @default.
- W2563628046 cites W2084859217 @default.
- W2563628046 cites W2089776862 @default.
- W2563628046 cites W2121876237 @default.
- W2563628046 cites W2122636851 @default.
- W2563628046 cites W2340899556 @default.
- W2563628046 doi "https://doi.org/10.1364/ao.56.00c168" @default.
- W2563628046 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28158071" @default.
- W2563628046 hasPublicationYear "2016" @default.
- W2563628046 type Work @default.
- W2563628046 sameAs 2563628046 @default.
- W2563628046 citedByCount "13" @default.
- W2563628046 countsByYear W25636280462017 @default.
- W2563628046 countsByYear W25636280462019 @default.
- W2563628046 countsByYear W25636280462020 @default.
- W2563628046 countsByYear W25636280462021 @default.
- W2563628046 countsByYear W25636280462022 @default.
- W2563628046 countsByYear W25636280462023 @default.
- W2563628046 crossrefType "journal-article" @default.
- W2563628046 hasAuthorship W2563628046A5004203748 @default.
- W2563628046 hasAuthorship W2563628046A5026444920 @default.
- W2563628046 hasAuthorship W2563628046A5068385330 @default.
- W2563628046 hasAuthorship W2563628046A5073249235 @default.
- W2563628046 hasAuthorship W2563628046A5082317831 @default.
- W2563628046 hasConcept C107365816 @default.
- W2563628046 hasConcept C120665830 @default.
- W2563628046 hasConcept C121332964 @default.
- W2563628046 hasConcept C159985019 @default.
- W2563628046 hasConcept C171250308 @default.
- W2563628046 hasConcept C19067145 @default.
- W2563628046 hasConcept C192562407 @default.
- W2563628046 hasConcept C22423302 @default.
- W2563628046 hasConcept C2777431650 @default.
- W2563628046 hasConcept C2779476251 @default.
- W2563628046 hasConcept C49040817 @default.
- W2563628046 hasConcept C49326732 @default.
- W2563628046 hasConcept C544956773 @default.
- W2563628046 hasConcept C61427134 @default.
- W2563628046 hasConceptScore W2563628046C107365816 @default.
- W2563628046 hasConceptScore W2563628046C120665830 @default.
- W2563628046 hasConceptScore W2563628046C121332964 @default.
- W2563628046 hasConceptScore W2563628046C159985019 @default.
- W2563628046 hasConceptScore W2563628046C171250308 @default.
- W2563628046 hasConceptScore W2563628046C19067145 @default.
- W2563628046 hasConceptScore W2563628046C192562407 @default.
- W2563628046 hasConceptScore W2563628046C22423302 @default.
- W2563628046 hasConceptScore W2563628046C2777431650 @default.
- W2563628046 hasConceptScore W2563628046C2779476251 @default.
- W2563628046 hasConceptScore W2563628046C49040817 @default.
- W2563628046 hasConceptScore W2563628046C49326732 @default.
- W2563628046 hasConceptScore W2563628046C544956773 @default.
- W2563628046 hasConceptScore W2563628046C61427134 @default.
- W2563628046 hasFunder F4320322795 @default.
- W2563628046 hasIssue "4" @default.
- W2563628046 hasLocation W25636280461 @default.
- W2563628046 hasLocation W25636280462 @default.
- W2563628046 hasOpenAccess W2563628046 @default.
- W2563628046 hasPrimaryLocation W25636280461 @default.
- W2563628046 hasRelatedWork W1968373997 @default.
- W2563628046 hasRelatedWork W1982004899 @default.
- W2563628046 hasRelatedWork W2092206813 @default.
- W2563628046 hasRelatedWork W2108887759 @default.
- W2563628046 hasRelatedWork W2159095735 @default.
- W2563628046 hasRelatedWork W2392807836 @default.
- W2563628046 hasRelatedWork W2434749670 @default.