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- W2563989743 abstract "MEMS vacuum packaging is now the impediment of the MEMS appliance in some specified fields. The major problem of current packaging approach is that the packaging process cannot meet the requirement of the ultra low leak. But the process cannot be improved with the existing technology. We propose a novel approach for MEMS vacuum packaging which can remarkably lower the leak rate. This paper analyzed the vacuum maintaining time of the vacuum packaging and compared the current design and new packaging method." @default.
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- W2563989743 date "2008-09-01" @default.
- W2563989743 modified "2023-09-22" @default.
- W2563989743 title "A Novel Approach for Micro-electro-mechanical System (MEMS) Vacuum Packaging" @default.
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