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• W2564609265 endingPage "374" @default.
• W2564609265 startingPage "364" @default.
• W2564609265 abstract "Fabrication of AlN thin films of 90 nm thickness was performed using magnetron sputtering technique at different deposition angles of 0°, 15°, 30°, 45° and 60°. Structural and morphological characteristics of the produced samples were obtained by means of x-ray diffraction (XRD), atomic force microscopy (AFM) and field emission electron microscopy (FESEM) analyses. The spectrophotometry analysis with both s- and p-polarized lights at two incident light angles of 30° and 60° were carried out for obtaining the optical spectra of the samples while Kramers-Kronig method was used for calculation of refractive index and further analysis carried out to obtain energy gaps and absorption peaks. Results showed maximum void fraction and surface roughness for film deposited at 30° consistent with previous publications on oblique angle deposition. The higher the porosity of the AlN films in this work showed lower refractive index and because smaller grains/nanoparticles are produced larger energy band gaps are obtained." @default.
• W2564609265 created "2017-01-06" @default.
• W2564609265 creator A5008278191 @default.
• W2564609265 creator A5043911516 @default.
• W2564609265 date "2017-03-01" @default.
• W2564609265 modified "2023-09-24" @default.
• W2564609265 title "Influence of deposition angle on the structural, morphological and optical properties of sputtered AlN thin films" @default.
• W2564609265 cites W1964109089 @default.
• W2564609265 cites W1964420044 @default.
• W2564609265 cites W1966265688 @default.
• W2564609265 cites W1972432954 @default.
• W2564609265 cites W1975568587 @default.
• W2564609265 cites W1990144507 @default.
• W2564609265 cites W1993629938 @default.
• W2564609265 cites W2000432511 @default.
• W2564609265 cites W2005202826 @default.
• W2564609265 cites W2005769031 @default.
• W2564609265 cites W2022123264 @default.
• W2564609265 cites W2028225746 @default.
• W2564609265 cites W2028489297 @default.
• W2564609265 cites W2034241911 @default.
• W2564609265 cites W2035649274 @default.
• W2564609265 cites W2035808262 @default.
• W2564609265 cites W2040937995 @default.
• W2564609265 cites W2041687070 @default.
• W2564609265 cites W2041924837 @default.
• W2564609265 cites W2044696532 @default.
• W2564609265 cites W2053382908 @default.
• W2564609265 cites W2063466925 @default.
• W2564609265 cites W2066129911 @default.
• W2564609265 cites W2066937989 @default.
• W2564609265 cites W2068696089 @default.
• W2564609265 cites W2079793464 @default.
• W2564609265 cites W2080112710 @default.
• W2564609265 cites W2081591163 @default.
• W2564609265 cites W2081803974 @default.
• W2564609265 cites W2082067277 @default.
• W2564609265 cites W2083760266 @default.
• W2564609265 cites W2085714099 @default.
• W2564609265 cites W2086664856 @default.
• W2564609265 cites W2090476860 @default.
• W2564609265 cites W2100623439 @default.
• W2564609265 cites W2122898779 @default.
• W2564609265 cites W2129283417 @default.
• W2564609265 cites W2143897759 @default.
• W2564609265 doi "https://doi.org/10.1016/j.ijleo.2016.12.067" @default.
• W2564609265 hasPublicationYear "2017" @default.
• W2564609265 type Work @default.
• W2564609265 sameAs 2564609265 @default.
• W2564609265 citedByCount "8" @default.
• W2564609265 countsByYear W25646092652017 @default.
• W2564609265 countsByYear W25646092652019 @default.
• W2564609265 countsByYear W25646092652020 @default.
• W2564609265 countsByYear W25646092652021 @default.
• W2564609265 countsByYear W25646092652022 @default.
• W2564609265 countsByYear W25646092652023 @default.
• W2564609265 crossrefType "journal-article" @default.
• W2564609265 hasAuthorship W2564609265A5008278191 @default.
• W2564609265 hasAuthorship W2564609265A5043911516 @default.
• W2564609265 hasBestOaLocation W25646092651 @default.
• W2564609265 hasConcept C107365816 @default.
• W2564609265 hasConcept C113196181 @default.
• W2564609265 hasConcept C120665830 @default.
• W2564609265 hasConcept C121332964 @default.
• W2564609265 hasConcept C151730666 @default.
• W2564609265 hasConcept C159985019 @default.
• W2564609265 hasConcept C171250308 @default.
• W2564609265 hasConcept C181966813 @default.
• W2564609265 hasConcept C185592680 @default.
• W2564609265 hasConcept C19067145 @default.
• W2564609265 hasConcept C192562407 @default.
• W2564609265 hasConcept C207114421 @default.
• W2564609265 hasConcept C22423302 @default.
• W2564609265 hasConcept C2779772531 @default.
• W2564609265 hasConcept C2816523 @default.
• W2564609265 hasConcept C42067758 @default.
• W2564609265 hasConcept C43617362 @default.
• W2564609265 hasConcept C49040817 @default.
• W2564609265 hasConcept C61427134 @default.
• W2564609265 hasConcept C64297162 @default.
• W2564609265 hasConcept C71039073 @default.
• W2564609265 hasConcept C86803240 @default.
• W2564609265 hasConceptScore W2564609265C107365816 @default.
• W2564609265 hasConceptScore W2564609265C113196181 @default.
• W2564609265 hasConceptScore W2564609265C120665830 @default.
• W2564609265 hasConceptScore W2564609265C121332964 @default.
• W2564609265 hasConceptScore W2564609265C151730666 @default.
• W2564609265 hasConceptScore W2564609265C159985019 @default.
• W2564609265 hasConceptScore W2564609265C171250308 @default.
• W2564609265 hasConceptScore W2564609265C181966813 @default.
• W2564609265 hasConceptScore W2564609265C185592680 @default.
• W2564609265 hasConceptScore W2564609265C19067145 @default.
• W2564609265 hasConceptScore W2564609265C192562407 @default.
• W2564609265 hasConceptScore W2564609265C207114421 @default.
• W2564609265 hasConceptScore W2564609265C22423302 @default.
• W2564609265 hasConceptScore W2564609265C2779772531 @default.
• W2564609265 hasConceptScore W2564609265C2816523 @default.
• W2564609265 hasConceptScore W2564609265C42067758 @default.

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