Matches in SemOpenAlex for { <https://semopenalex.org/work/W2564834093> ?p ?o ?g. }
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- W2564834093 endingPage "277" @default.
- W2564834093 startingPage "269" @default.
- W2564834093 abstract "In this work, deep levels introduced by RTA and by subsequent anneals in n-type silicon were studied by deep level transient spectroscopy and by photoluminescence. After annealing at 650 {degree sign}C, centers related to rod-like defects appeared. Furthermore, signals related to thermal donors were found in a wide temperature range. New thermal donors were found even after annealing at temperatures above 900 {degree sign}C. The appearance of rod-like defects indicates that during cooling after RTA soak interstitials supersaturate. The appearance of rod-like defects is accompanied by a decrease of the thermal donor concentration" @default.
- W2564834093 created "2017-01-06" @default.
- W2564834093 creator A5062144926 @default.
- W2564834093 creator A5070829190 @default.
- W2564834093 creator A5088628506 @default.
- W2564834093 creator A5090247309 @default.
- W2564834093 date "2013-03-15" @default.
- W2564834093 modified "2023-09-23" @default.
- W2564834093 title "Characterization of Deep Levels Introduced by RTA and by Subsequent Anneals in n-Type Silicon" @default.
- W2564834093 doi "https://doi.org/10.1149/05005.0269ecst" @default.
- W2564834093 hasPublicationYear "2013" @default.
- W2564834093 type Work @default.
- W2564834093 sameAs 2564834093 @default.
- W2564834093 citedByCount "2" @default.
- W2564834093 countsByYear W25648340932016 @default.
- W2564834093 countsByYear W25648340932018 @default.
- W2564834093 crossrefType "journal-article" @default.
- W2564834093 hasAuthorship W2564834093A5062144926 @default.
- W2564834093 hasAuthorship W2564834093A5070829190 @default.
- W2564834093 hasAuthorship W2564834093A5088628506 @default.
- W2564834093 hasAuthorship W2564834093A5090247309 @default.
- W2564834093 hasConcept C113196181 @default.
- W2564834093 hasConcept C121332964 @default.
- W2564834093 hasConcept C159985019 @default.
- W2564834093 hasConcept C164675345 @default.
- W2564834093 hasConcept C185592680 @default.
- W2564834093 hasConcept C192562407 @default.
- W2564834093 hasConcept C204530211 @default.
- W2564834093 hasConcept C2777855556 @default.
- W2564834093 hasConcept C2780080961 @default.
- W2564834093 hasConcept C39353612 @default.
- W2564834093 hasConcept C43617362 @default.
- W2564834093 hasConcept C49040817 @default.
- W2564834093 hasConcept C544956773 @default.
- W2564834093 hasConcept C8010536 @default.
- W2564834093 hasConcept C85080765 @default.
- W2564834093 hasConcept C97355855 @default.
- W2564834093 hasConceptScore W2564834093C113196181 @default.
- W2564834093 hasConceptScore W2564834093C121332964 @default.
- W2564834093 hasConceptScore W2564834093C159985019 @default.
- W2564834093 hasConceptScore W2564834093C164675345 @default.
- W2564834093 hasConceptScore W2564834093C185592680 @default.
- W2564834093 hasConceptScore W2564834093C192562407 @default.
- W2564834093 hasConceptScore W2564834093C204530211 @default.
- W2564834093 hasConceptScore W2564834093C2777855556 @default.
- W2564834093 hasConceptScore W2564834093C2780080961 @default.
- W2564834093 hasConceptScore W2564834093C39353612 @default.
- W2564834093 hasConceptScore W2564834093C43617362 @default.
- W2564834093 hasConceptScore W2564834093C49040817 @default.
- W2564834093 hasConceptScore W2564834093C544956773 @default.
- W2564834093 hasConceptScore W2564834093C8010536 @default.
- W2564834093 hasConceptScore W2564834093C85080765 @default.
- W2564834093 hasConceptScore W2564834093C97355855 @default.
- W2564834093 hasIssue "5" @default.
- W2564834093 hasLocation W25648340931 @default.
- W2564834093 hasOpenAccess W2564834093 @default.
- W2564834093 hasPrimaryLocation W25648340931 @default.
- W2564834093 hasRelatedWork W1969656731 @default.
- W2564834093 hasRelatedWork W1971448825 @default.
- W2564834093 hasRelatedWork W1972502380 @default.
- W2564834093 hasRelatedWork W1972990362 @default.
- W2564834093 hasRelatedWork W1974971997 @default.
- W2564834093 hasRelatedWork W2016079684 @default.
- W2564834093 hasRelatedWork W2042580679 @default.
- W2564834093 hasRelatedWork W2088081281 @default.
- W2564834093 hasRelatedWork W2142384054 @default.
- W2564834093 hasRelatedWork W2155006174 @default.
- W2564834093 hasVolume "50" @default.
- W2564834093 isParatext "false" @default.
- W2564834093 isRetracted "false" @default.
- W2564834093 magId "2564834093" @default.
- W2564834093 workType "article" @default.