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• W2565438053 abstract "Zinc oxynitride (ZnOxNy) has attracted much attention as an amorphous semiconductor with high electron mobility. Recent studies reported that ZnOxNy thin films grown by sputtering contained nanocrystals, which might reduce their electron mobility through grain boundary scattering. In this study, we fabricated amorphous ZnOxNy thin films on a glass substrate by a less-energetic nitrogen-plasma-assisted pulsed laser deposition (PLD) to suppress the formation of the nanocrystals. Grown by PLD under optimized conditions, these ZnOxNy thin films exhibited extremely flat surfaces with a root-mean-squared roughness (Rrms) of less than 0.3 nm. The Hall mobility of these films exceeded 200 cm2 V−1 s−1 at a critical carrier concentration of ∼1 × 1019 cm−3, which was twice as high as the reported values for sputter-deposited films. Meanwhile, the mobility of films with larger Rrms was limited to ∼160 cm2 V−1 s−1 even at the critical carrier concentration and comparable with that of the sputter-deposited ZnOxNy films. The substantial enhancement in mobility in extremely flat ZnOxNy films demonstrated that suppressing the formation of nanocrystals is the key to fabricating amorphous ZnOxNy thin films with very high mobility." @default.
• W2565438053 created "2017-01-06" @default.
• W2565438053 creator A5026930690 @default.
• W2565438053 creator A5030279641 @default.
• W2565438053 creator A5036448117 @default.
• W2565438053 creator A5041321712 @default.
• W2565438053 creator A5041788588 @default.
• W2565438053 creator A5077442587 @default.
• W2565438053 creator A5077527853 @default.
• W2565438053 date "2016-12-26" @default.
• W2565438053 modified "2023-10-18" @default.
• W2565438053 title "Amorphous ZnO<i>x</i>Ny thin films with high electron Hall mobility exceeding 200 cm2 V−1 s−1" @default.
• W2565438053 cites W1877908080 @default.
• W2565438053 cites W1965684190 @default.
• W2565438053 cites W1966909270 @default.
• W2565438053 cites W1979230434 @default.
• W2565438053 cites W1980694009 @default.
• W2565438053 cites W1999589524 @default.
• W2565438053 cites W2009956726 @default.
• W2565438053 cites W2017342267 @default.
• W2565438053 cites W2028142138 @default.
• W2565438053 cites W2030195401 @default.
• W2565438053 cites W2052599521 @default.
• W2565438053 cites W2065623444 @default.
• W2565438053 cites W2073108066 @default.
• W2565438053 cites W2092677681 @default.
• W2565438053 cites W2094970744 @default.
• W2565438053 cites W2118373239 @default.
• W2565438053 cites W2131716975 @default.
• W2565438053 cites W2191190336 @default.
• W2565438053 cites W2209032473 @default.
• W2565438053 cites W2320082081 @default.
• W2565438053 cites W2321565572 @default.
• W2565438053 cites W2326468973 @default.
• W2565438053 cites W2332838171 @default.
• W2565438053 cites W2509526411 @default.
• W2565438053 doi "https://doi.org/10.1063/1.4973203" @default.
• W2565438053 hasPublicationYear "2016" @default.
• W2565438053 type Work @default.
• W2565438053 sameAs 2565438053 @default.
• W2565438053 citedByCount "19" @default.
• W2565438053 countsByYear W25654380532017 @default.
• W2565438053 countsByYear W25654380532019 @default.
• W2565438053 countsByYear W25654380532020 @default.
• W2565438053 countsByYear W25654380532021 @default.
• W2565438053 countsByYear W25654380532022 @default.
• W2565438053 countsByYear W25654380532023 @default.
• W2565438053 crossrefType "journal-article" @default.
• W2565438053 hasAuthorship W2565438053A5026930690 @default.
• W2565438053 hasAuthorship W2565438053A5030279641 @default.
• W2565438053 hasAuthorship W2565438053A5036448117 @default.
• W2565438053 hasAuthorship W2565438053A5041321712 @default.
• W2565438053 hasAuthorship W2565438053A5041788588 @default.
• W2565438053 hasAuthorship W2565438053A5077442587 @default.
• W2565438053 hasAuthorship W2565438053A5077527853 @default.
• W2565438053 hasBestOaLocation W25654380532 @default.
• W2565438053 hasConcept C106782819 @default.
• W2565438053 hasConcept C111368507 @default.
• W2565438053 hasConcept C113196181 @default.
• W2565438053 hasConcept C119599485 @default.
• W2565438053 hasConcept C127313418 @default.
• W2565438053 hasConcept C127413603 @default.
• W2565438053 hasConcept C134112204 @default.
• W2565438053 hasConcept C159985019 @default.
• W2565438053 hasConcept C171250308 @default.
• W2565438053 hasConcept C185592680 @default.
• W2565438053 hasConcept C19067145 @default.
• W2565438053 hasConcept C192562407 @default.
• W2565438053 hasConcept C22423302 @default.
• W2565438053 hasConcept C2777289219 @default.
• W2565438053 hasConcept C37982897 @default.
• W2565438053 hasConcept C43617362 @default.
• W2565438053 hasConcept C47908070 @default.
• W2565438053 hasConcept C49040817 @default.
• W2565438053 hasConcept C56052488 @default.
• W2565438053 hasConcept C61427134 @default.
• W2565438053 hasConcept C69990965 @default.
• W2565438053 hasConcept C8010536 @default.
• W2565438053 hasConcept C87976508 @default.
• W2565438053 hasConceptScore W2565438053C106782819 @default.
• W2565438053 hasConceptScore W2565438053C111368507 @default.
• W2565438053 hasConceptScore W2565438053C113196181 @default.
• W2565438053 hasConceptScore W2565438053C119599485 @default.
• W2565438053 hasConceptScore W2565438053C127313418 @default.
• W2565438053 hasConceptScore W2565438053C127413603 @default.
• W2565438053 hasConceptScore W2565438053C134112204 @default.
• W2565438053 hasConceptScore W2565438053C159985019 @default.
• W2565438053 hasConceptScore W2565438053C171250308 @default.
• W2565438053 hasConceptScore W2565438053C185592680 @default.
• W2565438053 hasConceptScore W2565438053C19067145 @default.
• W2565438053 hasConceptScore W2565438053C192562407 @default.
• W2565438053 hasConceptScore W2565438053C22423302 @default.
• W2565438053 hasConceptScore W2565438053C2777289219 @default.
• W2565438053 hasConceptScore W2565438053C37982897 @default.
• W2565438053 hasConceptScore W2565438053C43617362 @default.
• W2565438053 hasConceptScore W2565438053C47908070 @default.
• W2565438053 hasConceptScore W2565438053C49040817 @default.
• W2565438053 hasConceptScore W2565438053C56052488 @default.
• W2565438053 hasConceptScore W2565438053C61427134 @default.
• W2565438053 hasConceptScore W2565438053C69990965 @default.

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