Matches in SemOpenAlex for { <https://semopenalex.org/work/W2565722892> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2565722892 endingPage "148" @default.
- W2565722892 startingPage "136" @default.
- W2565722892 abstract "To decrease the effort in detecting micromechanical features by touch probe measuring systems, multiple touch probes composed in an array are used to measure some of these structures at the same time, owing to the alignment of many similar structures on a wafer. While in previous work the touch probe signal is read out electrically, the use of optical techniques by observing the reflective back plane of the micro probe array is a promising approach to detect the displacement of several touch probes simultaneously. In this investigation, a structured illumination measurement system is used to detect the deflection of the micro touch probes. By detecting several fringe patterns with different periods, orientations and phase-shifts a correlation between the coordinate of a CCD camera pixel and the observed monitor pixel coordinate can be obtained. A deflection of the touch probe leads to a deformation of the reflective back plane of the micro probe array and, thus, a different monitor pixel coordinate is observed by the CCD pixel. Using an image obtained with an undeformed touch probe array as a reference, the displacement of the touch probe can be derived." @default.
- W2565722892 created "2017-01-06" @default.
- W2565722892 creator A5002879873 @default.
- W2565722892 creator A5040536349 @default.
- W2565722892 creator A5066142487 @default.
- W2565722892 creator A5082078634 @default.
- W2565722892 creator A5084416202 @default.
- W2565722892 creator A5088094542 @default.
- W2565722892 date "2013-04-03" @default.
- W2565722892 modified "2023-10-06" @default.
- W2565722892 title "Detection of the Displacement of Micro Touch Probes Using Structured Illumination" @default.
- W2565722892 cites W1966795084 @default.
- W2565722892 cites W1967397188 @default.
- W2565722892 cites W1978828769 @default.
- W2565722892 cites W1985833481 @default.
- W2565722892 cites W1991499667 @default.
- W2565722892 cites W1994822066 @default.
- W2565722892 cites W2006728239 @default.
- W2565722892 cites W2006932419 @default.
- W2565722892 cites W2012150970 @default.
- W2565722892 cites W2036590694 @default.
- W2565722892 cites W2037590362 @default.
- W2565722892 cites W2055242397 @default.
- W2565722892 cites W2060075686 @default.
- W2565722892 cites W2076042467 @default.
- W2565722892 cites W2166378182 @default.
- W2565722892 cites W4364851857 @default.
- W2565722892 doi "https://doi.org/10.1080/15599612.2013.785042" @default.
- W2565722892 hasPublicationYear "2013" @default.
- W2565722892 type Work @default.
- W2565722892 sameAs 2565722892 @default.
- W2565722892 citedByCount "0" @default.
- W2565722892 crossrefType "journal-article" @default.
- W2565722892 hasAuthorship W2565722892A5002879873 @default.
- W2565722892 hasAuthorship W2565722892A5040536349 @default.
- W2565722892 hasAuthorship W2565722892A5066142487 @default.
- W2565722892 hasAuthorship W2565722892A5082078634 @default.
- W2565722892 hasAuthorship W2565722892A5084416202 @default.
- W2565722892 hasAuthorship W2565722892A5088094542 @default.
- W2565722892 hasBestOaLocation W25657228921 @default.
- W2565722892 hasConcept C107551265 @default.
- W2565722892 hasConcept C120665830 @default.
- W2565722892 hasConcept C121332964 @default.
- W2565722892 hasConcept C154945302 @default.
- W2565722892 hasConcept C15744967 @default.
- W2565722892 hasConcept C160633673 @default.
- W2565722892 hasConcept C160671074 @default.
- W2565722892 hasConcept C192562407 @default.
- W2565722892 hasConcept C24890656 @default.
- W2565722892 hasConcept C2781355719 @default.
- W2565722892 hasConcept C31972630 @default.
- W2565722892 hasConcept C41008148 @default.
- W2565722892 hasConcept C49040817 @default.
- W2565722892 hasConcept C542102704 @default.
- W2565722892 hasConceptScore W2565722892C107551265 @default.
- W2565722892 hasConceptScore W2565722892C120665830 @default.
- W2565722892 hasConceptScore W2565722892C121332964 @default.
- W2565722892 hasConceptScore W2565722892C154945302 @default.
- W2565722892 hasConceptScore W2565722892C15744967 @default.
- W2565722892 hasConceptScore W2565722892C160633673 @default.
- W2565722892 hasConceptScore W2565722892C160671074 @default.
- W2565722892 hasConceptScore W2565722892C192562407 @default.
- W2565722892 hasConceptScore W2565722892C24890656 @default.
- W2565722892 hasConceptScore W2565722892C2781355719 @default.
- W2565722892 hasConceptScore W2565722892C31972630 @default.
- W2565722892 hasConceptScore W2565722892C41008148 @default.
- W2565722892 hasConceptScore W2565722892C49040817 @default.
- W2565722892 hasConceptScore W2565722892C542102704 @default.
- W2565722892 hasIssue "2" @default.
- W2565722892 hasLocation W25657228921 @default.
- W2565722892 hasOpenAccess W2565722892 @default.
- W2565722892 hasPrimaryLocation W25657228921 @default.
- W2565722892 hasRelatedWork W1985417357 @default.
- W2565722892 hasRelatedWork W1988252515 @default.
- W2565722892 hasRelatedWork W1998662473 @default.
- W2565722892 hasRelatedWork W2075391483 @default.
- W2565722892 hasRelatedWork W2095182624 @default.
- W2565722892 hasRelatedWork W2115053376 @default.
- W2565722892 hasRelatedWork W2121416564 @default.
- W2565722892 hasRelatedWork W2129617696 @default.
- W2565722892 hasRelatedWork W2742348144 @default.
- W2565722892 hasRelatedWork W2955207210 @default.
- W2565722892 hasVolume "7" @default.
- W2565722892 isParatext "false" @default.
- W2565722892 isRetracted "false" @default.
- W2565722892 magId "2565722892" @default.
- W2565722892 workType "article" @default.