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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2566974806> ?p ?o ?g. }

• W2566974806 endingPage "216" @default.
• W2566974806 startingPage "213" @default.
• W2566974806 abstract "This paper describes a two-dimensional etching-process simulator, TEPS, which includes a mesh structure generator for uniform/non-uniform grids. In order to simulate an etching profile, the input is first passed through a grid-generator. This grid-generator produces a rectangular two-dimensional mesh structure, which is used for simulating isotropic and anisotropic components of etching (to include ion, radical and wet etching). The numerical model proposed by Yamamoto et al for etching is, used to determine the location after etching. Triangulation of the rectangular elements of the mesh structure is also incorporated. It also reviews the work done in semiconductor process simulations used in Integrated Circuit (IC) fabrication." @default.
• W2566974806 created "2017-01-06" @default.
• W2566974806 creator A5030355695 @default.
• W2566974806 creator A5088877722 @default.
• W2566974806 date "1995-05-01" @default.
• W2566974806 modified "2023-09-25" @default.
• W2566974806 title "TEPS: Two-dimensional Etching Process Simulator" @default.
• W2566974806 cites W1973982943 @default.
• W2566974806 cites W2010091218 @default.
• W2566974806 cites W2012370871 @default.
• W2566974806 cites W2028829482 @default.
• W2566974806 cites W2038558715 @default.
• W2566974806 cites W2074431095 @default.
• W2566974806 cites W2111208034 @default.
• W2566974806 cites W2114444988 @default.
• W2566974806 doi "https://doi.org/10.1080/03772063.1995.11437251" @default.
• W2566974806 hasPublicationYear "1995" @default.
• W2566974806 type Work @default.
• W2566974806 sameAs 2566974806 @default.
• W2566974806 citedByCount "0" @default.
• W2566974806 crossrefType "journal-article" @default.
• W2566974806 hasAuthorship W2566974806A5030355695 @default.
• W2566974806 hasAuthorship W2566974806A5088877722 @default.
• W2566974806 hasConcept C100460472 @default.
• W2566974806 hasConcept C111919701 @default.
• W2566974806 hasConcept C120665830 @default.
• W2566974806 hasConcept C121332964 @default.
• W2566974806 hasConcept C127413603 @default.
• W2566974806 hasConcept C130472188 @default.
• W2566974806 hasConcept C136525101 @default.
• W2566974806 hasConcept C142724271 @default.
• W2566974806 hasConcept C160671074 @default.
• W2566974806 hasConcept C163258240 @default.
• W2566974806 hasConcept C171250308 @default.
• W2566974806 hasConcept C184050105 @default.
• W2566974806 hasConcept C187691185 @default.
• W2566974806 hasConcept C189575605 @default.
• W2566974806 hasConcept C192562407 @default.
• W2566974806 hasConcept C204787440 @default.
• W2566974806 hasConcept C2524010 @default.
• W2566974806 hasConcept C2779227376 @default.
• W2566974806 hasConcept C2780992000 @default.
• W2566974806 hasConcept C33220542 @default.
• W2566974806 hasConcept C33923547 @default.
• W2566974806 hasConcept C41008148 @default.
• W2566974806 hasConcept C459310 @default.
• W2566974806 hasConcept C49040817 @default.
• W2566974806 hasConcept C62520636 @default.
• W2566974806 hasConcept C66018809 @default.
• W2566974806 hasConcept C71924100 @default.
• W2566974806 hasConcept C78519656 @default.
• W2566974806 hasConcept C85725439 @default.
• W2566974806 hasConcept C98045186 @default.
• W2566974806 hasConceptScore W2566974806C100460472 @default.
• W2566974806 hasConceptScore W2566974806C111919701 @default.
• W2566974806 hasConceptScore W2566974806C120665830 @default.
• W2566974806 hasConceptScore W2566974806C121332964 @default.
• W2566974806 hasConceptScore W2566974806C127413603 @default.
• W2566974806 hasConceptScore W2566974806C130472188 @default.
• W2566974806 hasConceptScore W2566974806C136525101 @default.
• W2566974806 hasConceptScore W2566974806C142724271 @default.
• W2566974806 hasConceptScore W2566974806C160671074 @default.
• W2566974806 hasConceptScore W2566974806C163258240 @default.
• W2566974806 hasConceptScore W2566974806C171250308 @default.
• W2566974806 hasConceptScore W2566974806C184050105 @default.
• W2566974806 hasConceptScore W2566974806C187691185 @default.
• W2566974806 hasConceptScore W2566974806C189575605 @default.
• W2566974806 hasConceptScore W2566974806C192562407 @default.
• W2566974806 hasConceptScore W2566974806C204787440 @default.
• W2566974806 hasConceptScore W2566974806C2524010 @default.
• W2566974806 hasConceptScore W2566974806C2779227376 @default.
• W2566974806 hasConceptScore W2566974806C2780992000 @default.
• W2566974806 hasConceptScore W2566974806C33220542 @default.
• W2566974806 hasConceptScore W2566974806C33923547 @default.
• W2566974806 hasConceptScore W2566974806C41008148 @default.
• W2566974806 hasConceptScore W2566974806C459310 @default.
• W2566974806 hasConceptScore W2566974806C49040817 @default.
• W2566974806 hasConceptScore W2566974806C62520636 @default.
• W2566974806 hasConceptScore W2566974806C66018809 @default.
• W2566974806 hasConceptScore W2566974806C71924100 @default.
• W2566974806 hasConceptScore W2566974806C78519656 @default.
• W2566974806 hasConceptScore W2566974806C85725439 @default.
• W2566974806 hasConceptScore W2566974806C98045186 @default.
• W2566974806 hasIssue "3" @default.
• W2566974806 hasLocation W25669748061 @default.
• W2566974806 hasOpenAccess W2566974806 @default.
• W2566974806 hasPrimaryLocation W25669748061 @default.
• W2566974806 hasRelatedWork W1524627141 @default.
• W2566974806 hasRelatedWork W1975337849 @default.
• W2566974806 hasRelatedWork W1977006984 @default.
• W2566974806 hasRelatedWork W1989535497 @default.
• W2566974806 hasRelatedWork W2031022880 @default.
• W2566974806 hasRelatedWork W2038558715 @default.
• W2566974806 hasRelatedWork W2076284060 @default.
• W2566974806 hasRelatedWork W2085222469 @default.
• W2566974806 hasRelatedWork W2120091467 @default.
• W2566974806 hasRelatedWork W2122119008 @default.
• W2566974806 hasRelatedWork W2358970546 @default.

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