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- W2568152611 abstract "High Q, low loss, small size, and the potential for high-frequency operation are the primary benefits of shear piezoelectric MEMS resonators. The mechanical Q of a device strongly determines the overall frequency stability of the resonator/oscillator under test. In particular, piezoelectric crystals such as quartz can be carefully oriented to provide frequency stabilization over temperature. Thickness-shear-mode (TSM) piezoelectric resonators have been fabricated in the MHz–GHz frequency range using wafer-level processing suitable for volume manufacturing of frequency control devices. This chapter discusses the fundamentals of shear-mode operation and provides examples of simulated and fabricated devices and their performance and applications." @default.
- W2568152611 created "2017-01-13" @default.
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- W2568152611 date "2017-01-01" @default.
- W2568152611 modified "2023-10-01" @default.
- W2568152611 title "Shear Piezoelectric MEMS Resonators" @default.
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- W2568152611 doi "https://doi.org/10.1007/978-3-319-28688-4_9" @default.
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