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- W2568364034 abstract "Abstract A brief review is given of recent progress toward a quantitative understanding of negative ion formation by sputtering from surfaces covered with fractional layers of highly electropositive adsorbates. Recently developed models for estimating changes in the work function Δφ by electropositive adsorbates and techniques for scaling the Sigmund sputter theory into better agreement with experimental data are also briefly described. Several negative ion sources which exemplify the practical utilization of the sputter principle are described in terms of their intensity capabilities and beam qualities (emittances)." @default.
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- W2568364034 date "1989-02-01" @default.
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- W2568364034 title "The sputter generation of negative ion beams" @default.
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- W2568364034 doi "https://doi.org/10.1016/0168-583x(89)90134-1" @default.
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