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- W2568761491 abstract "A floating type Langmuir probe was studied to measure the electron energy distribution function (EEDF) in plasmas. This method measures the current (I)-voltage (V) curve with rising and falling variations based on a floating potential by using charge-discharge characteristics of the series capacitor when a square-pulse voltage is applied. In addition, this method measures the EEDF by using the alternating current (ac) superposition method. The measured EEDFs were in good agreement with results from a conventional single Langmuir probe. This technique could be applied as a plasma diagnostic method in the capacitively coupled plasma where the plasma potential is extremely high or the processing plasma where the deposition gas is used." @default.
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- W2568761491 date "2017-01-01" @default.
- W2568761491 modified "2023-10-16" @default.
- W2568761491 title "Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas" @default.
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- W2568761491 doi "https://doi.org/10.1063/1.4972576" @default.
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