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• W2569337188 abstract "Abstract Titanium dioxide films were prepared by ion beam enhanced deposition (IBED), where the films were synthesized by depositing titanium atoms and simultaneously bombarding with Ne+, Ar+ and Xe+ ion beams respectively at an energy of 40 keV in an O2 environment. Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD) and Raman spectroscopy were used to characterize the deposited films. It was found that the O Ti ratio of films deposited is less than 2 : 1. XPS analysis shows that Ti2+, Ti3+ and Ti4+ chemical states exist on the titanium oxide films. The films deposited at different ion beam bombardment are principally crystalline TiO2 with a rutile structure. The films deposited with Ne+ bombardment exhibit a (1 0 0) preferred orientation. Films deposited with Xe+ bombardment exhibit a high (1 0 0) orientation and increase the (1 0 0) orientation with decreasing ion beam current density. The lattice parameter of the deposited films is larger than that of bulk materials. The grain size of the films is between 20 and 60 nm and decreases with increasing mass of bombarding ions." @default.
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• W2569337188 date "1997-12-01" @default.
• W2569337188 modified "2023-09-29" @default.
• W2569337188 title "Synthesis of titanium dioxide films by ion beam enhanced deposition" @default.
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• W2569337188 doi "https://doi.org/10.1016/s0168-583x(97)00495-3" @default.
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