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- W2570394881 abstract "Measurement of line-edge or linewidth roughness involves uncertainty, like all measurements, and an estimate of that uncertainty should be reported whenever a roughness measurement is reported. However, roughness measurement uncertainty estimates are complicated by the correlations along the length of the rough feature. As a result, roughness measurements are often not accompanied by uncertainty estimates or error bars on graphs. Here, both theoretical considerations and simulations of random rough features will be used to derive a simple formula to estimate the uncertainty of a roughness measurement using the standard parameters describing that roughness: standard deviation, correlation length, and roughness exponent. Additionally, a more accurate formula to estimate the systematic bias in roughness standard deviation is provided." @default.
- W2570394881 created "2017-01-13" @default.
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- W2570394881 date "2017-01-05" @default.
- W2570394881 modified "2023-09-25" @default.
- W2570394881 title "Uncertainty in roughness measurements: putting error bars on line-edge roughness" @default.
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- W2570394881 doi "https://doi.org/10.1117/1.jmm.16.1.010501" @default.
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