Matches in SemOpenAlex for { <https://semopenalex.org/work/W25709056> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W25709056 abstract "Because of its good depth resolution and high sensitivity, SIMS is ideally suited for determining the depth distribution of sample constituents in the 0.1–10 μm depth range. The accuracy of measured depth distributions is generally limited by instrumental distortions [1]. A primary goal in SIMS instrument development, therefore, has been to eliminate such distortions by careful instrument design. The most recent advance in this direction is the Physical Electronics Model 6300 SIMS system. In this paper, the design and operation of this system is briefly described. An example of a depth profile of a B implant in Si is presented that demonstrates the performance of the instrument." @default.
- W25709056 created "2016-06-24" @default.
- W25709056 creator A5002971503 @default.
- W25709056 creator A5031632415 @default.
- W25709056 date "1984-01-01" @default.
- W25709056 modified "2023-09-24" @default.
- W25709056 title "High-Performance Depth Profiling with a Quadrupole-Based SIMS Instrument" @default.
- W25709056 cites W2075769922 @default.
- W25709056 cites W4240329705 @default.
- W25709056 doi "https://doi.org/10.1007/978-3-642-82256-8_84" @default.
- W25709056 hasPublicationYear "1984" @default.
- W25709056 type Work @default.
- W25709056 sameAs 25709056 @default.
- W25709056 citedByCount "2" @default.
- W25709056 crossrefType "book-chapter" @default.
- W25709056 hasAuthorship W25709056A5002971503 @default.
- W25709056 hasAuthorship W25709056A5031632415 @default.
- W25709056 hasConcept C111919701 @default.
- W25709056 hasConcept C119599485 @default.
- W25709056 hasConcept C120665830 @default.
- W25709056 hasConcept C121332964 @default.
- W25709056 hasConcept C127413603 @default.
- W25709056 hasConcept C138331895 @default.
- W25709056 hasConcept C159985019 @default.
- W25709056 hasConcept C187191949 @default.
- W25709056 hasConcept C192562407 @default.
- W25709056 hasConcept C204323151 @default.
- W25709056 hasConcept C41008148 @default.
- W25709056 hasConcept C62646347 @default.
- W25709056 hasConcept C97355855 @default.
- W25709056 hasConceptScore W25709056C111919701 @default.
- W25709056 hasConceptScore W25709056C119599485 @default.
- W25709056 hasConceptScore W25709056C120665830 @default.
- W25709056 hasConceptScore W25709056C121332964 @default.
- W25709056 hasConceptScore W25709056C127413603 @default.
- W25709056 hasConceptScore W25709056C138331895 @default.
- W25709056 hasConceptScore W25709056C159985019 @default.
- W25709056 hasConceptScore W25709056C187191949 @default.
- W25709056 hasConceptScore W25709056C192562407 @default.
- W25709056 hasConceptScore W25709056C204323151 @default.
- W25709056 hasConceptScore W25709056C41008148 @default.
- W25709056 hasConceptScore W25709056C62646347 @default.
- W25709056 hasConceptScore W25709056C97355855 @default.
- W25709056 hasLocation W257090561 @default.
- W25709056 hasOpenAccess W25709056 @default.
- W25709056 hasPrimaryLocation W257090561 @default.
- W25709056 hasRelatedWork W1968412275 @default.
- W25709056 hasRelatedWork W1977735991 @default.
- W25709056 hasRelatedWork W1990424739 @default.
- W25709056 hasRelatedWork W1991281199 @default.
- W25709056 hasRelatedWork W1993034793 @default.
- W25709056 hasRelatedWork W1993241540 @default.
- W25709056 hasRelatedWork W1994795824 @default.
- W25709056 hasRelatedWork W2025413965 @default.
- W25709056 hasRelatedWork W2030290676 @default.
- W25709056 hasRelatedWork W2048279405 @default.
- W25709056 hasRelatedWork W206699015 @default.
- W25709056 hasRelatedWork W2075725507 @default.
- W25709056 hasRelatedWork W2081940424 @default.
- W25709056 hasRelatedWork W2085373941 @default.
- W25709056 hasRelatedWork W2156868702 @default.
- W25709056 hasRelatedWork W2415409032 @default.
- W25709056 hasRelatedWork W272978178 @default.
- W25709056 hasRelatedWork W2905516995 @default.
- W25709056 hasRelatedWork W3009712820 @default.
- W25709056 hasRelatedWork W2487296661 @default.
- W25709056 isParatext "false" @default.
- W25709056 isRetracted "false" @default.
- W25709056 magId "25709056" @default.
- W25709056 workType "book-chapter" @default.